AgInSbTe相变薄膜的热刻蚀腐蚀特性
李豪1,2, 耿永友1, 吴谊群1,3

Thermal Etching Characteristics of AgInSbTe Phase Change Film
LI Hao1,2, GENG Yong-You1, WU Yi-Qun1,3
图5 非晶态和晶态AgInSbTe薄膜在不同浓度NaOH溶液中腐蚀时薄膜厚度随腐蚀时间的变化
Fig. 5 Film thickness vs etching time for the amorphous and crystalline phases of the AgInSbTe films in NaOH solution with different concentrations