AgInSbTe相变薄膜的热刻蚀腐蚀特性
李豪1,2, 耿永友1, 吴谊群1,3

Thermal Etching Characteristics of AgInSbTe Phase Change Film
LI Hao1,2, GENG Yong-You1, WU Yi-Qun1,3
图2 退火前后AgInSbTe薄膜的厚度与透过率之间的关系, 测量波长650 nm
Fig. 2 Relationship between transmittance and thickness of AgInSbTe films at the wavelength of 650 nm a as-deposited after annealed at b 200℃, c 250℃ and d 300℃