拉曼面扫描表征氮掺杂6H-SiC晶体多型分布
郭啸1,2, 刘学超1, 忻隽1, 杨建华1, 施尓畏1

Characterization of Polytype Distributions in Nitrogen-doped 6H-SiC Single Crystal by Raman Mapping
GUO Xiao1,2, LIU Xue-Chao1, XIN Jun1, YANG Jian-Hua1, SHI Er-Wei1
图6 第5号晶片的高分辨X射线摇摆曲线半高宽分布图
Fig. 6 Spatial image of the full width at half maximum of high-resolution X-ray diffraction rocking curve for the 5 th wafer