拉曼面扫描表征氮掺杂6H-SiC晶体多型分布
郭啸1,2, 刘学超1, 忻隽1, 杨建华1, 施尓畏1

Characterization of Polytype Distributions in Nitrogen-doped 6H-SiC Single Crystal by Raman Mapping
GUO Xiao1,2, LIU Xue-Chao1, XIN Jun1, YANG Jian-Hua1, SHI Er-Wei1
图2 近邻籽晶生长面的第5、6号晶片的三种SiC多型分布图
Fig. 2 Spatial characterization images of three types of SiC polytypes in the 5 th and 6 th wafers close to the seed crystal a 5 th -6H; b 5 th -15R; c 5 th -4H; d 6 th -6H; e 6 th -15R; f 6 th -4H The color represents matching degree between the Raman spectra of test points and the standard Raman spectra of three polytypes