Journal of Inorganic Materials

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Effects of Heat Treatment and Doping of Nb5+ on Sensitivity Properties of TiO2-based Material

PEI Su-Hua; SUN Hai-Bo; WANG Qiang; SUN Zhen-Cui; SHI Li-Wei   

  1. Institute of Semiconductor; Shandong Normal University; Ji nan 250014; China
  • Received:2003-07-03 Revised:2003-09-22 Published:2004-07-20 Online:2004-07-20

Abstract: Titanium is a premium metal-oxide material sensitive to trimethylamine (TMA) gas. To obtain high
sensitivity and low power of elements, annealing in N2, doping with Nb5+ and long-time sintering were applied to improve the conductivity
of TiO2-based sensitive materials. It is concluded that low oxygen pressure can enhance self-semiconductorization. Doping with 10% Nb5+
that substitutes for Ti4+ and long-time sintering that promotes conversion from Ti3+ to Ti4+ can improve conductivity of material and
stability of elements. As a result, a new method is procured to make low-resistance sensor with high sensitivity and good selectivity.

Key words: TiO2, annealing in N2, doping with Nb5+, long-time sintering

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