Preparation and Characterization of Tetragonal BaTiO3 Thin Film with Self-assembled Monolayers Technique

doi:10.3724/SP.J.1077.2009.00749

Abstract

Abstract: Self-assembled monolayers (SAMs) technique based on traditional liquid phase deposition and bio-inspired theory is one of the most promising processes for preparing inorganic thin films. Using octadecyl-trichloro-silane (OTS) as stencil, tetragonal BaTiO₃thin film was successfully prepared on glass wafers in the solution consisting of (NH₄)₂TiF₆, Ba(NO₃)₂ and H₃BO₃ with SAMs technique. Hydrophilic characteristic mensuration of glass wafers and photographs of atomic force microscopy (AFM) indicate that the hydrophobe substrate changes into hydrophile by UV iradiation, and a modification of OTS-SAM is changed by UV light. Photographs of metallographic microscope indicate that the surface of BaTiO₃ thin film deposited on OTS-SAM is smooth and homogeneous, and an induction of BaTiO3 thin film deposition is directed by OTS-SAM. X-ray diffraction (XRD) and field-emission scanning electron microscope (FE-SEM) results show that the BaTiO3 thin film with well-crystalline tetragonal phase is successfully prepared after annealing at 600℃ in air for 2h. BaTiO₃ thin film grows on glass substrate with a rod-like morphology, the length of the nanowire is in the range from 500nm to 1000nm, which is composed of nanosized grains of around 100nm. The formation mechanism of OTS-SAM and BaTiO₃ thin film is carefully discussed.

Key words: self-assembled monolayers, BaTiO₃, thin film, formation mechanism

CLC Number:

TB43
TQ132

TAN Guo-Qiang,LIU Jian,MIAO Hong-Yan,HE Zhong-Liang,XIA Ao. Preparation and Characterization of Tetragonal BaTiO₃ Thin Film with Self-assembled Monolayers Technique[J]. Journal of Inorganic Materials, DOI: 10.3724/SP.J.1077.2009.00749.

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Preparation and Characterization of Tetragonal BaTiO₃ Thin Film with Self-assembled Monolayers Technique

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