Abstract: The highly ordered anodic aluminium oxide film, namely, AAO film was prepared with the electrochemical anodization method. On-line nanomeasurement and in-situ scanning functions were conducted by the nanocompression instrument cooperated with nanoindenter. The results show that the nanohardness of AAO film with 50nm hole at 0, 3.3, 6.6, 9.9μm compression displacement is 1.49, 1.79, 1.69, 1.55GPa and the elastic modulus is 11.79, 12.32, 12.82, 13.19GPa. The indentations at 6.6, 9.9μm compression displacement appear obvious plastic deformation produced by the compression force as indicated by the load versus displacement curve and indentation surface morphology, so the nanohardness decreases while the elastic modulus increases all through.

Key words: anodic aluminium oxide film (AAO), nanocompression, nanoindentation, in-situ scanning