Abstract: Diamond films prepared by hot filament chemical vapor deposition (CVD) were polished by a composite technique of laser polishing and hot chemical polishing. The surface morphology and microstructure of the films were characterized by X-ray diffraction (XRD), Raman, scan electron microscopes (SEM) and atomic force microscopes (AFM). The measurement results of the diamond films before and after composite polishing show that the diamond films are high quality (111)-oriented polycrystalline diamond films. The roughness of the diamond films is decreased obviously and is in the order of 100 nm after polishing. The microstructure of the diamond films can't be changed by composite polishing. All the results obtained indicate that the composite polishing technique is an effective way for diamond surface disposal.

Key words: CVD diamond films, composite polishing, surface roughness