Journal of Inorganic Materials ›› 2023, Vol. 38 ›› Issue (10): 1117-1132.DOI: 10.15541/jim20230037

Special Issue: 【结构材料】超高温结构陶瓷(202312)

• REVIEW •     Next Articles

Progress of High Strength and High Thermal Conductivity Si3N4 Ceramics for Power Module Packaging

FU Shi1,2(), YANG Zengchao1(), LI Jiangtao1,2()   

  1. 1. Key Laboratory of Cryogenics, Technical Institute of Physics and Chemistry, Chinese Academy of Sciences, Beijing 100190, China
    2. Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing 100049, China
  • Received:2023-01-20 Revised:2023-04-07 Published:2023-10-20 Online:2023-05-24
  • Contact: LI Jiangtao, professor. E-mail: lijiangtao@mail.ipc.ac.cn;
    YANG Zengchao, senior engineer. E-mail: yangzengchao@mail.ipc.ac.cn
  • About author:FU Shi (1995-), male, PhD candidate. E-mail: fushi18@mails.ucas.ac.cn
  • Supported by:
    National Key R&D Program of China(2022YFE0201200);National Natural Science Foundation of China(92263205)

Abstract:

With the rise of the third-generation wide-bandgap semiconductors represented by SiC and GaN, power electronic devices are developing rapidly towards high output power and high power density, putting forward higher performance requirements on ceramic substrate materials used for power module packaging. The conventional Al2O3 and AlN ceramics are inadequate for the new generation of power module packaging applications due to low thermal conductivity or poor mechanical properties. In comparison, the newly developed Si3N4 ceramics have become the most potential insulating heat dissipation substrate materials due to its excellent mechanical properties and high thermal conductivity. In recent years, researchers have made a series of breakthroughs in the preparation of high strength and high thermal conductivity Si3N4 ceramics by screening effective sintering additive systems and optimizing the sintering processes. Meanwhile, as the advancement of the engineering application of coppered Si3N4 ceramic substrate, the evaluation of its mechanical, thermal, and electrical properties has become a research hotspot. Starting from the factors affecting thermal conductivity of Si3N4 ceramics, this article reviews the domestic and international research work focused on sintering aids selection and sintering processes improvement to enhance the thermal conductivity of Si3N4 ceramics. In addition, the latest progress in the dielectric breakdown strength of Si3N4 ceramic substrates and the evaluation of properties after being coppered are also systematically summarized and introduced. Based on above progresses and faced challengies, the future development direction of high strength and high thermal conductivity Si3N4 ceramic substrates is prospected.

Key words: silicon nitride, thermal conductivity, mechanical property, sintering additives, sintering processes, review

CLC Number: