Preparation of Epitaxial Metallic LaNiO3 Thin Film by Polymer Assisted Deposition

doi:10.15541/jim20210271

Abstract

Abstract:

LaNiO₃ (LNO), as a promising material in ferroelectric super lattices, super conductive heterostructures and catalysts has recently attracted great interest. Herein, a facile and low-cost polymer assisted deposition (PAD) method is established to prepare epitaxial LNO thin films on (001) orientated SrTiO₃ (STO) with excellent conductivity. Various structural and electrical characterizations of the film were investigated. The film has good crystallinity with a full-width at half-maximum value of 0.38° from the rocking curve for the (002) reflection. High resolution XRD φ-scans further confirmed the heteroepitaxial growth of LNO film on STO substrate. There are four peaks separated by 90°, showing that the LNO thin film is cubic-on-cubic grown on STO substrate. In-situ high temperature XRD measurement showed epitaxial growth of LNO thin film on STO substrate. Metal cations could be released orderly on the monocrystalline substrate and epitaxial crystallization occurs after decomposition of polymer. XPS results indicated that LaNiO₃ thin film fabricated by PAD was stoichiometric without oxygen vacancy. The atomic force microscopy analysis showed that the smooth surface with root-mean-square surface roughness was 0.67 nm. The resistivity as functions of temperature revealed that it has good conductivity from 10 K to 300 K. All results demonstrate that the LaNiO₃ thin films deposited by PAD have better comprehensive performance, indicating that PAD method has great potential for preparing epitaxial functional thin film materials.

Key words: LaNiO₃, conductive film, polymer assisted deposition, epitaxial

CLC Number:

TQ174

YANG Zhu, GUO Shaobo, CAI Henghui, DONG Xianlin, WANG Genshui. Preparation of Epitaxial Metallic LaNiO₃ Thin Film by Polymer Assisted Deposition[J]. Journal of Inorganic Materials, 2022, 37(5): 561-566.

Figures/Tables 5

References 31

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Preparation of Epitaxial Metallic LaNiO₃ Thin Film by Polymer Assisted Deposition

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Figures/Tables 5

References 31

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Method	Substrate	Orientation	d/nm	ρ_{300 K}/ (μΩ·cm)	Ref.
SCD	SrTiO₃	Preferred orientation	100	340	[31]
RF-MS	LaAlO₃	Epitaxial	9	~150	[28]
MBE	SrTiO₃	Epitaxial	36	~90	[29]
PLD	SrTiO₃	Epitaxial	50-60	100	[30]
PAD	SrTiO₃	Epitaxial	25	160	This work

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