Amorphous LiSiON Thin Film Electrolyte for All-solid-state Thin Film Lithium Battery

doi:10.15541/jim20210132

Journal of Inorganic Materials ›› 2022, Vol. 37 ›› Issue (2): 230-236.DOI: 10.15541/jim20210132

• RESEARCH LETTER • Previous Articles

Amorphous LiSiON Thin Film Electrolyte for All-solid-state Thin Film Lithium Battery

XIA Qiuying, SUN Shuo, ZAN Feng, XU Jing, XIA Hui

School of Materials Science and Engineering, Nanjing University of Science and Technology, Nanjing 210094, China

Received:2021-03-06 Revised:2021-05-06 Published:2022-02-20 Online:2021-06-10
Contact: XIA Hui, professor. E-mail: xiahui@njust.edu.cn
About author:XIA Qiuying (1991-), male, PhD. E-mail: qiuyingxia@njust.edu.cn
Supported by:
National Key R&D Program of China (2020YFB2007400); National Natural Science Foundation of China (51802159, 51972174, 52002183)

Abstract

Abstract: All-solid-state thin film lithium battery (TFLB) is regarded as the ideal power source for microelectronic devices. However, the relatively low ionic conductivity of amorphous solid-state electrolyte limits the improvement of electrochemical performance for TFLB. In this work, amorphous lithium silicon oxynitride (LiSiON) thin films are prepared by magnetron sputtering as solid-state electrolyte for TFLB. With optimized deposition condition, the LiSiON thin film exhibits a high ionic conductivity of 6.3×10^-6 S∙cm^-1 at room temperature and a wide voltage window over 5 V, making it a suitable thin film electrolyte for TFLB. A MoO₃/LiSiON/Li TFLB is constructed based on the LiSiON thin film electrolyte with large specific capacity (282 mAh∙g^-1 at 50 mA∙g^-1), good rate capability (50 mAh∙g^-1 at 800 mA∙g^-1), and acceptable cycle life (78.1% capacity retention after 200 cycles), demonstrating the feasibility of this electrolyte for practical applications.

Key words: LiSiON, thin film electrolyte, all-solid-state lithium battery, thin film battery

CLC Number:

TQ174

XIA Qiuying, SUN Shuo, ZAN Feng, XU Jing, XIA Hui. Amorphous LiSiON Thin Film Electrolyte for All-solid-state Thin Film Lithium Battery[J]. Journal of Inorganic Materials, 2022, 37(2): 230-236.

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Amorphous LiSiON Thin Film Electrolyte for All-solid-state Thin Film Lithium Battery

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