Journal of Inorganic Materials ›› 2021, Vol. 36 ›› Issue (8): 847-855.DOI: 10.15541/jim20200639
• RESEARCH ARTICLE • Previous Articles Next Articles
ZHANG Weiwei1(), LU Chen1, YING Guobing1, ZHANG Jianfeng1(), JIANG Wan2
Received:
2020-11-09
Revised:
2020-12-09
Published:
2021-08-20
Online:
2020-12-30
Contact:
ZHANG Jianfeng, professor. E-mail: jfzhang_sic@163.com
About author:
ZHANG Weiwei(1996-), female, Master candidate. E-mail: zwwbob@163.com
Supported by:
CLC Number:
ZHANG Weiwei, LU Chen, YING Guobing, ZHANG Jianfeng, JIANG Wan. Effect and Mechanism of the Surface Treatment and Gradation Filling of AlN on the Performance of Insulation Layer of Copper Clad Laminate[J]. Journal of Inorganic Materials, 2021, 36(8): 847-855.
Fig. 2 (a-d) Particle size distribution curves and (e-h) SEM images of AlN with different particle sizes (a) 1 μm AlN; (b) 5 μm AlN; (c) 50 μm AlN; (d) 80 μm AlN; (e-h) SEM images of the AlN corresponding to (a-d)
Fig. 4 SEM images of (a-d) cross-sections and (e-h) surfaces of CCLs filled with pAlN of same filling ratio but different sizes (a) pAlN-1 μm; (b) pAlN-5 μm; (c) pAlN-50 μm; (d) pAlN-80 μm; (e-h) SEM images corresponding to the surfaces of (a-d) CCLs
Fig. 5 SEM images of the cross-section of CCLs with different filling ratios of pAlN((a) no filler; (b) pAlN-50 μm-20%; (c) pAlN-50 μm-60%; (d) pAlN-50 μm60%-5 μm5%); (e) EDS scan selection area with the inset showing the element distribution; (f) the full element scan image; (g-j) corresponding element distributions of Al, N, Si, C
Fig. 6 Heat conduction mechanism diagram of CCLs under different filling schemes (a) Without filler; (b) With single-size filler; (c) With graded filler
Fig. 7 (a) Effects of pAlN with different sizes, different filling amounts and (b) gradation filling (pAlN-50 μm x%-5 μm y%, x=0-60, y=0-15, same below) on the thermal conductivity of CCLs
Treatment | Thermal conductivity/ (W·m-1·K-1) | Peel strength/ (N·mm-1) | Dielectric constant | Dielectric loss/×10-3 | Bending strength/MPa | Water absorption/% |
---|---|---|---|---|---|---|
Without fillers | 0.291 | 0.949 | 3.90 | 5.41 | 220 | 0.40 |
AlN-1 μm60% | 0.390 | 0.380 | 5.10 | 9.10 | 208 | 0.76 |
pAlN-1 μm60% | 0.610 | 0.980 | 4.55 | 9.04 | 282 | 0.47 |
Table 1 Effect of phosphoric acid treatment of AlN on the performance of CCLs
Treatment | Thermal conductivity/ (W·m-1·K-1) | Peel strength/ (N·mm-1) | Dielectric constant | Dielectric loss/×10-3 | Bending strength/MPa | Water absorption/% |
---|---|---|---|---|---|---|
Without fillers | 0.291 | 0.949 | 3.90 | 5.41 | 220 | 0.40 |
AlN-1 μm60% | 0.390 | 0.380 | 5.10 | 9.10 | 208 | 0.76 |
pAlN-1 μm60% | 0.610 | 0.980 | 4.55 | 9.04 | 282 | 0.47 |
Fig. 10 Effect of pAlN with different size and filling amount on the dielectric constant (a) and dielectric loss (b) of the CCLs; Influence of gradation filling on the dielectric constant (c) and dielectric loss (d) of corresponding CCLs
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