Journal of Inorganic Materials ›› 2017, Vol. 32 ›› Issue (1): 51-55.DOI: 10.15541/jim20160268
• Orginal Article • Previous Articles Next Articles
ZHUO Shi-Yi, LIU Xi, GAO Pan, YAN Cheng-Feng, SHI Er-Wei
Received:
2016-04-18
Revised:
2016-07-22
Published:
2017-01-20
Online:
2016-12-15
About author:
ZHUO Shi-Yi. E-mail: syzhuo@mail.sic.ac.cn
CLC Number:
ZHUO Shi-Yi, LIU Xi, GAO Pan, YAN Cheng-Feng, SHI Er-Wei. Luminescence of Donor-acceptor-pair in Fluorescent 4H-SiC Doped with Nitrogen, Boron and Aluminum[J]. Journal of Inorganic Materials, 2017, 32(1): 51-55.
Fig. 1 (a) Photographs of 3-inch fluorescent 4H-SiC wafer grown by PVT method; (b) a visible light emitting fluorescent 4H-SiC sample excited by 325 nm pulsed laser source with a power of 5 mJ. The spot diameter of 325 nm laser source is about 10 mm
Sample | [B]/cm-3 | [Al]/cm-3 | [N]/cm-3 |
---|---|---|---|
a | 9.68×1018 | 8.81×1016 | 8.49×1018 |
b | 9.05×1018 | 1.77×1016 | 7.60×1018 |
c | 1.09×1019 | 3.30×1016 | 8.12×1018 |
d | 8.08×1018 | 7.19×1015 | 6.91×1018 |
e | 1.05×1019 | 6.10×1015 | 3.49×1018 |
f | 1.08×1019 | 3.91×1015 | 7.01×1018 |
g | 5.66×1017 | 3.34×1016 | 1.20×1018 |
Table 1 SIMS results of N, B, Al doping concentration ([B], [Al], [N]) in samples a-g
Sample | [B]/cm-3 | [Al]/cm-3 | [N]/cm-3 |
---|---|---|---|
a | 9.68×1018 | 8.81×1016 | 8.49×1018 |
b | 9.05×1018 | 1.77×1016 | 7.60×1018 |
c | 1.09×1019 | 3.30×1016 | 8.12×1018 |
d | 8.08×1018 | 7.19×1015 | 6.91×1018 |
e | 1.05×1019 | 6.10×1015 | 3.49×1018 |
f | 1.08×1019 | 3.91×1015 | 7.01×1018 |
g | 5.66×1017 | 3.34×1016 | 1.20×1018 |
Sample | τ1/μs | τ2/μs | τ/μs |
---|---|---|---|
a | 72.60 | 1542.13 | 910.38 |
b | 93.12 | 1838.96 | 1167.66 |
c | 78.79 | 1699.81 | 1040.48 |
d | 88.58 | 1910.29 | 1247.37 |
e | 79.29 | 1822.03 | 1142.43 |
f | 100.80 | 2093.37 | 1407.54 |
g | 171.02 | 1341.72 | 1021.90 |
Table 2 Fluorescence life time of samples a-g
Sample | τ1/μs | τ2/μs | τ/μs |
---|---|---|---|
a | 72.60 | 1542.13 | 910.38 |
b | 93.12 | 1838.96 | 1167.66 |
c | 78.79 | 1699.81 | 1040.48 |
d | 88.58 | 1910.29 | 1247.37 |
e | 79.29 | 1822.03 | 1142.43 |
f | 100.80 | 2093.37 | 1407.54 |
g | 171.02 | 1341.72 | 1021.90 |
Sample | IQE/% | Abs | EQE/% |
---|---|---|---|
a | 7.86 | 0.689 | 5.41 |
b | 9.67 | 0.937 | 9.07 |
c | 8.71 | 0.678 | 5.90 |
d | 11.13 | 0.939 | 10.45 |
e | 10.17 | 0.937 | 9.53 |
f | 11.88 | 0.928 | 11.03 |
g | 1.07 | 0.628 | 0.67 |
Table 3 Values of absorbance and internal and external quantum efficiencies (IQE and EQE) evaluated from PL spectra
Sample | IQE/% | Abs | EQE/% |
---|---|---|---|
a | 7.86 | 0.689 | 5.41 |
b | 9.67 | 0.937 | 9.07 |
c | 8.71 | 0.678 | 5.90 |
d | 11.13 | 0.939 | 10.45 |
e | 10.17 | 0.937 | 9.53 |
f | 11.88 | 0.928 | 11.03 |
g | 1.07 | 0.628 | 0.67 |
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