Journal of Inorganic Materials ›› 2014, Vol. 29 ›› Issue (3): 275-278.DOI: 10.3724/SP.J.1077.2014.13277

• Orginal Article • Previous Articles     Next Articles

Effects of Ba Ratio on Properties of YBCO Film Prepared by MOCVD

LIU Xin, XIONG Jie, ZHANG Fei, ZHAO Xiao-Hui, ZHAO Rui-Peng, TAO Bo-Wan   

  1. (State Key Lab of Electronic Thin Films and Integrated Devices, University of Electronic Science and Technology of China, Chengdu 610054, China)
  • Received:2013-05-20 Revised:2013-07-10 Published:2014-03-20 Online:2014-02-18
  • About author:LIU Xin. E-mail: liuxin_hope@163.com

Abstract:

YBa2Cu3O7-x(YBCO) films were deposited on single crystal LaAlO3(001) substrates by MOCVD with the single source system and flash evaporation mode. The effects of Barium content on the composition, microstructure and current carrying capacity of YBCO superconducting films were systematically investigated. The results demonstrated that CuO grains were inclined to form in YBCO films with lower Ba content. As Ba content increasing, Ba2CuO3 grains began to form and the size of the grain kept increased. The amount and size of the second phase and its lattice match with YBCO played important roles in biaxial epitaxial growth and current carrying capability of YBCO films. When the mole ratio of Ba/Y is 3.9 in precursor, the 300 nm-thickness YBCO superconducting film with good in-plane and out-of-plane texture have been successfully fabricated, showing the critical current density (Jc at self-field, 77 K) of 4.0 MA/cm2 measured by induction method.

Key words: MOCVD, YBCO, high temperature superconducting, critical current density

CLC Number: