Influence of V Content on Microstructure, Mechanical and Friction Properties of TaVN Composite Films

doi:10.3724/SP.J.1077.2013.12498

Abstract

Abstract: A series of TaVN composite films with different V contents were fabricated by magnetron sputtering technique. The microstructures, mechanical properties, friction properties at different temperatures were investigated by X-ray diffraction, nano-indentation, CSM high-temperature ball-on-disc tribo-meter, respectively. The results show that the microstructure of TaVN films has fcc structure. With V content increasing, the preferential orientation changes from (111) to (200), and the hardness increases to a peak value (32.3 GPa) and then decreases. At room temperature, the friction coefficient of TaVN films decreases as V content increases, which may be related to the formation of V₂O₅. When the temperatures increase from room temperature to 800℃, the friction coefficient increases and then decreases. The friction mechanisms of TaVN composite films and TaN film at high temperature are compared based on the crystal chemistry theory.

Key words: TaVN composited films, magnetron sputtering technique, mechanical properties, friction properties

CLC Number:

TG174

XU Jun-Hua, XUE Ya-Ping, CAO Jun, YU Li-Hua. Influence of V Content on Microstructure, Mechanical and Friction Properties of TaVN Composite Films[J]. Journal of Inorganic Materials, 2013, 28(7): 769-774.

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