Mechanical Properties and Tribological Performance of TiN/VCN Multilayers

doi:10.3724/SP.J.1077.2013.12196

Abstract

Abstract:

Monolithic TiN, VCN films and TiN/VCN nano-multilayer films with different modulation periods were prepared by magnetron sputtering. Microstructures, mechanical properties and friction properties at room and high temperature of these films were investigated by X-ray diffraction (XRD), nano-indentation, and CSM high temperature ball-on-disc tribometer. The results show that the TiN/VCN multilayer films are mainly nanocrystalline with δ-NaCl fcc structure. Maximum hardness of TiN/VCN multilayer films is 28.71 GPa, about 23% higher than the value calculated by the rule of mixtures. Based on these data, a mechanism of the superhardness in this system is proposed. Friction coefficients of TiN/VCN multilayers are similar to that of TiN films at room temperature, but lower than that of TiN films when testing temperature is increased to 700℃. Wear rates of TiN/VCN multilayers at room and high temperature decrease about 3×10^-14 m³/(N·m) comparing to that of single layer film. The lubrication mechanism of Magnéli phase (V₂O₅) is discussed in terms of crystal chemistry and thermal measurement methods. In conclusion, compared to TiN films, the friction and wear properties of TiN/VCN multilayer films are greatly improved.

Key words: TiN/VCN, magnetron sputtering, mechanical properties, friction properties, Magn&#x000e9, li phase

CLC Number:

TG174

CAO Jun, XU Jun-Hua, YU Li-Hua. Mechanical Properties and Tribological Performance of TiN/VCN Multilayers[J]. Journal of Inorganic Materials, 2013, 28(2): 195-200.

Figures/Tables 7

Table 1 Process parameters of the films

Sample	Films	Modulation period/nm
A	TiN	-
B	VCN	-
C	TiN/VCN-2	2
D	TiN/VCN-5	5
E	TiN/VCN-7	7
F	TiN/VCN-10	10

Fig. 1 XRD patterns of TiN、VCN films and TiN/VCN multilayer films

Fig. 2 Microhardness of TiN、VCN films and TiN/VCN multilayer films

Table 2 Friction coefficient and wear rate of different films at room temperature

Sample	TiN	VCN	TiN/VCN-2	TiN/VCN-5	TiN/VCN-7	TiN/VCN-10
Friction coefficient	0.57	0.36	0.65	0.62	0.66	0.58
Wear rate /(×10^-14, m³·N^-1·m^-1)	5.91	2.22	1.23	3.64	2.45	3.35

Table 3 Friction coefficient and wear rate of different films at 700℃

Sample	TiN	VCN	TiN/VCN-2	TiN/VCN-5	TiN/VCN-7	TiN/VCN-10
Friction coefficient	0.52	0.40	0.40	0.46	0.41	0.41
Wear rate /(×10^-14, m³·N^-1·m^-1)	10.97	6.89	11.20	7.24	7.88	9.23

Fig.3 SEM images of wear scar of TiN (a) and VCN (b) single films at 700℃

Fig. 4 SEM images and EDS analysis of wear scar of TiN/VCN multilayer films with 10 nm modulation periods at 700℃

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