Effect of Annealing Temperature on the Structure andTribological Propertyof a-C:H Film

doi:10.3724/SP.J.1077.2011.00209

Abstract

Abstract: Hydrogenatedamorphous carbon (a-C:H) films were annealed in air, to investigate the effect of ambient temperatureon thestructure and properties of a-C:H films. After annealed at differenttemperatures, structure, composition and properties of a-C:H films wereinvestigated <>via Fourier transform infrared spectroscopy (FTIR), Raman spectroscope, X-ray photoelectronspectroscope (XPS), 3D surface profiler and ball-on-disk tribotester. Compared with the as-deposited film, thea-C:H film annealed at low temperature of 300℃ exhibits similar structure,with internal decreasing stress and notably improved tribological property. Comparatively,at elevated temperatures of 400℃ and 500℃, the annealed films present severe graphitization and oxidation, contributingto the deterioration of the tribological properties or even complete failure.Thus, the annealing temperature plays a significant role on the structure,composition and properties of a-C:H films.

Key words: a-C:H film, annealing temperature, structure, tribologicalproperty

CLC Number:

O484

WANG Yong-Xia, YE Yin-Ping, LIHong-Xuan, JI Li, CHEN Jian-Min, ZHOUHui-Di. Effect of Annealing Temperature on the Structure andTribological Propertyof a-C:H Film[J]. Journal of Inorganic Materials, 2011, 26(2): 209-213.

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