Journal of Inorganic Materials ›› 2010, Vol. 25 ›› Issue (11): 1150-1154.DOI: 10.3724/SP.J.1077.2010.01150

• Research Paper • Previous Articles     Next Articles

Microstructural and Microwave Electromagnetic Properties of FeCoB-SiO2 Film on PET Substrate

ZHANG Li1, ZHU Zi-Wei1, KUANG Ren-Xiong2, DENG Long-Jiang1   

  1. (1. School of Microelectronic and Solid State Electronic, University of Electronic Science and Technology of China, Chengdu 610054, China; 2. China Electronics Technology Group Corporation, No. 29 Research Institute, Chengdu 610036, China)
  • Received:2010-02-12 Revised:2010-05-28 Published:2010-11-20 Online:2010-11-01

Abstract: Microstructural and electromagnetic properties of FeCoB-SiO2 films prepared on PET substrates by radio- frequency sputtering were investigated. The as-deposited FeCoB-SiO2 films are found to be amorphous with an electrical resistivity of 1755.73 μΩ·cm and a saturation magnetization of 0.7 T. Because of the existence of nonmagnetic matrix resistance to magnetic wall displacement, those FeCoB-SiO2 films have a substantially higher coercivity of 13130.205 A/m over that of traditional amorphous magnetic films. Complex permeability μ was measured by a microwave network analyzer using the coaxial transmission technique, and double resonance peaks in microwave magnetic permeability were observed in the frequency range of 3.8-5 GHz. This is beneficial for the films to be used as a micro absorber at large bandwidths, resulting in μ'>2.5 in the frequency range of 500 MHz-12 GHz and μ''>6 for 3.6-8 GHz. The experimental results demonstrate that the FeCoB-SiO2 films deposited on flexible substrates have good potential for high frequency applications.

Key words: microwave electromagnetic property, PET substrate, permeability

CLC Number: