Superhard C1-x-yNxZry Composite Films Prepared by Pulsed Bias Arc Ion Plating

doi:10.3724/SP.J.1077.2010.00517

Abstract

Abstract:

A series of C_1-x-yN_xZr_ycomposite films were deposited on a cemented carbide substrate using pulsed bias arc ion plating by adjusting the nitrogen flow rate and the Zr target arc current simultaneously with the graphite target arc current fixing. The Zr and N contents in the films increase linearly while the C content shows an inverse trend as the Zr target arc current and N flow rate increase. The Raman spectra indicate that the deposited films are the characteristic diamondlike carbon. XRD results show that the ZrN crystalline phase is formed in the films. The hardness first increases and then decreases with increasing Zr and N contents, reaching the highest superhard value of 43.6GPa at x=0.19, y=0.28.

Key words: DLC film, superhard composite film, pulsed bias, arc ion plating

CLC Number:

TB43

LI Hong-Kai, LIN Guo-Qiang, DONG Chen. Superhard C_1-x-yN_xZr_yComposite Films Prepared by Pulsed Bias Arc Ion Plating[J]. Journal of Inorganic Materials, 2010, 25(5): 517-521.

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Superhard C_1-x-yN_xZr_yComposite Films Prepared by Pulsed Bias Arc Ion Plating

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