Preparation of Nano-TiO2 Thick Film and its Electrical Properities

Journal of Inorganic Materials

• Research Paper • Previous Articles Next Articles

Preparation of Nano-TiO₂ Thick Film and its Electrical Properities

WANG Jun; GAO Lian; SONG Zhe; ZHOU Wei

State Key Lab of High Performance Ceramics Superfine Microstructure; Shanghai Institute ofCeramics; Chinese Academy of Sciences Shanghai 200050 China

Received:1997-12-29 Revised:1998-01-15 Published:1998-12-20 Online:1998-12-20

Abstract

Abstract: Nano-TiO₂ and micro-TiO₂ thick films were prepared on a-Al₂O₃ substrates by silk netlithograph method, the measured film resistance of nano-TiO₂ was higher than that of micro-TiO₂in experimental temperature range, nano-TiO₂ film demonstrated more change as the O₂partialpressure changed. XRD and SEM were also used to characterize the stucture of the prepared films.

Key words: nano-TiO₂, resistance, gas sensitivity, sensor, thick film

CLC Number:

TF123

WANG Jun,GAO Lian,SONG Zhe,ZHOU Wei. Preparation of Nano-TiO₂ Thick Film and its Electrical Properities[J]. Journal of Inorganic Materials.

[1]	ZHANG Shuo, FU Qiangang, ZHANG Pei, FEI Jie, LI Wei. Influence of High Temperature Treatment of C/C Porous Preform on Friction and Wear Behavior of C/C-SiC Composites [J]. Journal of Inorganic Materials, 2023, 38(5): 561-568.
[2]	ZHANG Aimei, ZHU Jiajia, FANG Tiancheng, PAN Xixi. Effects of Al³⁺ Doping on the Structure and Electrical Transport Property of La_0.8Sr_0.2Mn_1-_xAl_xO₃ [J]. Journal of Inorganic Materials, 2023, 38(2): 148-154.
[3]	HUA Siheng, YANG Dongwang, TANG Hao, YUAN Xiong, ZHAN Ruoyu, XU Zhuoming, LYU Jianan, XIAO Yani, YAN Yonggao, TANG Xinfeng. Effect of Surface Treatment of n-type Bi₂Te₃-based Materials on the Properties of Thermoelectric Units [J]. Journal of Inorganic Materials, 2023, 38(2): 163-169.
[4]	LI Yanyan, PENG Yusi, LIN Chenglong, LUO Xiaoying, TENG Zheng, ZHANG Xi, HUANG Zhengren, YANG Yong. Nanomaterials and Biosensing Technology for the SARS-CoV-2 Detection [J]. Journal of Inorganic Materials, 2023, 38(1): 3-31.
[5]	LIU Yao, YOU Xunhai, ZHAO Bing, LUO Xiaoying, CHEN Xing. Functional Nanomaterials for Electrochemical SRAS-CoV-2 Biosensors: a Review [J]. Journal of Inorganic Materials, 2023, 38(1): 32-42.
[6]	CHEN Junyun, SUN Lei, JIN Tianye, LUO Kun, ZHAO Zhisheng, TIAN Yongjun. Binderless Layered BN Toughened cBN for Ultra-precision Cutting [J]. Journal of Inorganic Materials, 2022, 37(6): 623-628.
[7]	HAO Hongjian, LI Haiyan, WAN Detian, BAO Yiwang, LI Yueming. Enhanced Flexural Strength and Thermal Shock Resistance of Alumina Ceramics by Mullite/Alumina Pre-stressed Coating [J]. Journal of Inorganic Materials, 2022, 37(12): 1295-1301.
[8]	LI Wenbo, QIAN Rong, ZHUO Shangjun, JIANG Hong, SHENG Cheng, ZHU Yueqin. MoS₂ with Different Morphologies: Preparation and Gas-sensing Property of NH₃ [J]. Journal of Inorganic Materials, 2022, 37(10): 1135-1140.
[9]	CHEN Yaling, SHU Song, WANG Shaoxin, LI Jianjun. Mn-HAP SCR Catalyst: Preparation and Sulfur Resistance [J]. Journal of Inorganic Materials, 2022, 37(10): 1065-1072.
[10]	LI Bangxin, ZHANG Qian, XIAO Jie, XIAO Wenyan, ZHOU Ying. Iron-doping Enhanced Basic Nickel Carbonate for Moisture Resistance and Catalytic Performance of Ozone Decomposition [J]. Journal of Inorganic Materials, 2022, 37(1): 45-50.
[11]	CHU Yuxing, LIU Hairui, YAN Shuang. Preparation and Gas Sensing Properties of SnO₂/NiO Composite Semiconductor Nanofibers [J]. Journal of Inorganic Materials, 2021, 36(9): 950-958.
[12]	ZHANG Weiwei, LU Chen, YING Guobing, ZHANG Jianfeng, JIANG Wan. Effect and Mechanism of the Surface Treatment and Gradation Filling of AlN on the Performance of Insulation Layer of Copper Clad Laminate [J]. Journal of Inorganic Materials, 2021, 36(8): 847-855.
[13]	WANG Hui, ZHANG Shujuan, CHEN Tingwei, ZHANG Chuanlin, LUO Haosu, ZHENG Renkui. Electronic Property of PdSe₂ Thin Films Fabricated by Post-selenization of Pd Films [J]. Journal of Inorganic Materials, 2021, 36(7): 779-784.
[14]	JIANG Hongmei, ZHAO Wenya, FU Ruijing, XIAO Guanjun. Pressure-resistance of Magic-sized Cadmium Selenide Nanocrystals [J]. Journal of Inorganic Materials, 2021, 36(5): 502-506.
[15]	WANG Haoxuan, LIU Qiaomu, WANG Yiguang. Research Progress of High Entropy Transition Metal Carbide Ceramics [J]. Journal of Inorganic Materials, 2021, 36(4): 355-364.

Preparation of Nano-TiO₂ Thick Film and its Electrical Properities

PDF (PC)

Knowledge

Abstract

Cite this article

share this article

References

Related Articles 15

Recommended Articles

Metrics

Comments