Journal of Inorganic Materials

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C-H System Low-Pressure Diamond Growth Condition influenced by Activation Temperature

LIU Zhi-Jie; ZHANG Wei; WAN Yong-Zhong; WANG Ji-Tao   

  1. Dept. of Electronic Engineering; CVD Lab.; Fudan University Shanghai 200433 China
  • Received:1997-06-06 Revised:1997-06-19 Published:1998-06-20 Online:1998-06-20

Abstract: Diamond growth phase diagrams were calculated under different activation temperaturesbased on non-equilibrium thermodynamic coupling model. The diamond growth regions are enlarged with the increase of activation temperature. As to different substrate temperatures, thediamond growth regions exhibit different tendency with activation temperature rising.

Key words: activation temperautre, diamond, C-H system, phase diagram

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