Abstract: Influence of modulating ratio on friction and wear behavior of TiN/Ti multilayer coatings was studied. Filtered cathode vacuum arc(FCVA) deposition method was applied in preparation of TiN/Ti multilayer coatings with different modulating ratios. Scanning electron microscope (SEM) and transmission electron microscope (TEM) were used in the film structure observation and individual layer analysis. Furthermore, nanohardness and elastic module were tested by nano-indenter and the friction and wear experiment was carried out on SRV tester. The experimental results show clear laminate structures in TiN/Ti multilayer coatings and good bonding between film and substrate. Nanohardness and the wear behavior are influenced remarkably by modulating ratio. Influence of modulating ratio on friction of multilayer coatings is relatively weak. Finally, the relationship between the ratio of hardness and elastic module (H/E) and the wear behavior of TiN/Ti multilayer coatings is discussed.

Key words: TiN and Ti, multilayer coating, layer structure, friction and wear