Journal of Inorganic Materials

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Imprint Properties of Yttrium Modified PZT Thin Films

QIU Ping-Sun; LUO Wei-Gen; DING Ai-Li   

  1. Laboratory of Inorganic Materials; chinese Academy of Sciences; Shanghai 200050; China
  • Received:2000-08-22 Revised:2000-10-12 Published:2001-09-20 Online:2001-09-20

Abstract: Imprint failure is one of the important failure mechanisms for PZT nonvolatile memo- ries. The imprint properties of Y-dopped PZT(40/60) thin films at bias voltages and a temperature of 120℃ were investigated. The results obtained show that the imprint-resistant properties of the PZT thin films are enhanced by a suitable Y dopant concentration.

Key words: ferroelectric thin films, Y-dopped PZT(40/60) thin films, imprinting

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