Journal of Inorganic Materials

• Research Paper • Previous Articles     Next Articles

Advances in the Study of Preparation and Properties of Carbon Nitride

XIAO Xing-Cheng; SONG Li-Xin; HU Xing-Fang   

  1. Shanghai Institute of Ceramics; Chinese Academy of Sciences Shanghai 200050 China
  • Received:1998-06-11 Revised:1998-07-15 Published:1999-06-20 Online:1999-06-20

Abstract: A detailed review was made on the structure of the carbon nitride together with its preparation process such as sputtering, chemical vapor deposition, ion assisted deposition and laser ablation.The resulting mechanical, electronic and optical properties were discussed, followed by the analysis for further studies.

Key words: carbon nitride, superhard films, process, properties

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