Abstract: Ti alloyed DLC films were prepared with a УВНИПА-1 deposition device by dual-excitation energy source. The mechanical properties and structures of the films
were measured and analyzed by Nanoindenter, Microhardness Tester, Atomic Force Microscope, as well as X-ray diffraction and X-ray
Photoelectron Spectroscope. Tribological tests were carried out on a ball-disk friction and wear tester. The performance change of DLC
films with different Ti alloying was investigated in view of heat treatment. The results show that the mechanical properties of the
films are not monotonous with Ti contents, and the friction coefficient increases with Ti content; the obvious microhardness increase results
from the formation of hardened TiC phase.

Key words: DLC film, thin film deposition, performance analysis