Microfabrication Technology of Three-Dimensional Microdevices and Their MEMS Applications

Abstract

Abstract: Recent status of microfabrication technology related to microelectromechanical systems (MEMS) is reviewed with
particular emphasis on the introduction of our newly developed three-dimensional microfabrication process using a micromachined silicon wafer
as a mold. By using the silicon molding processes, piezoelectric microrod arrays, thermoelectric microelement arrays and silicon carbide micro gas
turbine rotors have been successfully fabricated. Their microfabrication processes are described in detail to demonstrate the success of the
combination of silicon micromachining and materials processing techniques. The prospects for materials microfabrication in the fields of miniature
medical apparatus and portable microscale energy sources are given.

Key words: MEMS, microfabrication, microscale materials processing, microdevice, piezoelectric, thermoelectric

CLC Number:

TQ174

LI Jing-Feng. Microfabrication Technology of Three-Dimensional Microdevices and Their MEMS Applications[J]. Journal of Inorganic Materials.

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