Optical Properties of a-GaN Film Deposited by DC Magnetron Sputtering

doi:10.3724/SP.J.1077.2007.00725

Abstract

Abstract: GaN thin films were prepared by direct current (DC) planar magnetron sputtering on Si and SiO$_2$. The films were characterized by X-ray diffraction (XRD), Raman, Fourier Transform Infrared Spectroscopy (FTIR), photoluminescence (PL) and UV-Vis spectra. XRD and Raman spectrum show that the films are amorphous. Fourier infrared absorbance spectrum shows
that the main absorbance is Ga-N stretching vibration. 360nm ultraviolet emission is obtained at room temperature. UV-Vis result shows that the optical band gap of the films is 3.74eV, which is consistent with photoluminescence spectrum result.
\vspace*{.2cm

Key words: amorphous GaN, DC sputtering, optical properties

CLC Number:

O472
O484

PAN Xiao-Jun,ZHANG Zhen-Xing,JIA Lu,LI Hui,XIE Er-Qing. Optical Properties of a-GaN Film Deposited by DC Magnetron Sputtering[J]. Journal of Inorganic Materials, DOI: 10.3724/SP.J.1077.2007.00725.

[1]	DENG Taoli, CHEN Hexin, HEI Lingli, LI Shuxing, XIE Rongjun. Achieving High Light Uniformity Laser-driven White Lighting Source by Introducing Secondary Phases in Phosphor Converters [J]. Journal of Inorganic Materials, 2022, 37(8): 891-896.
[2]	HU Feng-Xiang, LI Ling, LIN Kui, CUI Lan, SHI Cai-Jing, SAYYAR Ali Shah, CUI Shen. Preparation of N-doped Hollow Carbon Spheres and Investigation of Their Optical Properties [J]. Journal of Inorganic Materials, 2016, 31(8): 827-833.
[3]	ZHOU Ding, SHI Ying, FAN Ling-Cong, LIN De-Bao, SUN Ze-Qing, XU Jia-Yue. Fabrication and Optical Properties of Ce, Pr Co-doped LuAG Transparent Ceramics [J]. Journal of Inorganic Materials, 2016, 31(10): 1099-1102.
[4]	ZHANG Dong-Mei, TIAN Lei, GUO Hui-Lin. Preparation and Optical Properties of Graphene Quantum Dots Containing Nitrogen [J]. Journal of Inorganic Materials, 2016, 31(10): 1123-1128.
[5]	YANG Yu-Jia, WANG Jing, HE Hui-Fen. Synthesis and Luminescence Properties of Tb³⁺ Doped BaZrO₃ Powders [J]. Journal of Inorganic Materials, 2016, 31(1): 27-33.
[6]	YANG Zhi-Huai, ZHANG Yun-Peng, ZHANG Mei-Guang, XU Qiang, ZHANG Ya-Ni, ZHANG Rong. The Electronic and Optical Properties of Tetrahedral Doped Co_1-_xRe_xCr₂O₄ (Re = Li, Na, K, Rb) Spinel [J]. Journal of Inorganic Materials, 2015, 30(8): 819-824.
[7]	YANG Rui, JIE Wan-Qi, SUN Xiao-Yan, YANG Min, HU Huan, LIN Yun. Characterization of Cr-doped ZnTe Crystals Grown by Temperature Gradient Solution Growth (TGSG) [J]. Journal of Inorganic Materials, 2015, 30(4): 401-407.
[8]	WANG Chen-Yang, HU Guan-Qin, WANG Hong, ZHAO Jing-Tai. Preparation of Bi₄Si₃O₁₂-based Glass-ceramics and Effect of Heat Treatments on Optical Properties [J]. Journal of Inorganic Materials, 2014, 29(2): 167-171.
[9]	WANG Xiao-Xiao, YANG Lin, LIU Hong, CHEN Qiang, XIAO Ding-Quan, ZHU Jian-Guo. Optical Properties of ZnS:Co+Cr Nanocrystals Synthesized by a Low Temperature Hydrothermal Process [J]. Journal of Inorganic Materials, 2014, 29(10): 1049-1054.
[10]	ZHENG Chun-Man, WEI Yong-Tao, XIE Kai, HAN Yu. Preparation of Polycrystalline Cu(In,Ga)Se₂ Thin Film with Nano-metal Oxide: the Chemical Reaction Process and Its Properties [J]. Journal of Inorganic Materials, 2013, 28(7): 701-706.
[11]	ZHANG Yang, HUANG Wan-Xia, SHI Qi-Wu, SONG Lin-Wei, XU Yuan-Jie. Thermal Modulation Behavior inside the Hysteresis Loop of W-Mo Co-doping Vanadium Dioxide Film [J]. Journal of Inorganic Materials, 2013, 28(5): 497-501.
[12]	LIU Guan-Wei, XIE Zhi-Peng, WU Yin. Application of Doping Ceramics via Infiltration on Translucent Alumina Ceramics [J]. Journal of Inorganic Materials, 2013, 28(4): 375-380.
[13]	JIN Teng-Teng, ZHANG Zhi-Jun, ZHANG Hui, ZHAO Jing-Tai. Crystal Structure, Phase Transition and Optical Properties of ν-PrBO₃ [J]. Journal of Inorganic Materials, 2013, 28(10): 1153-1157.
[14]	HUANG Shuai, LI Chen-Hui, SUN Yi-Hua, KE Wen-Ming. Influence of the Substrate Temperature on the Properties of Nb-doped TiO₂ Films Deposited by DC Magnetron Sputtering [J]. Journal of Inorganic Materials, 2012, 27(1): 64-68.
[15]	Ding Jian-Xu,LIU Bing,Wang Sheng-Lai,Mu Xiao-Ming,GU Qing-Tian,XU Xin-Guang,SUN Xun,SUN Yun,LIU Wen-Jie,LIU Guang-Xia,ZHU Sheng-Jun. Effect of Cr³⁺ Dopant on Growth Habit and Optical Properties of Rapid Grown KDP Crystal [J]. Journal of Inorganic Materials, 2011, 26(4): 354-358.

Optical Properties of a-GaN Film Deposited by DC Magnetron Sputtering

PDF (PC)

Knowledge

Cited

Abstract

Cite this article

share this article

References

Related Articles 15

Recommended Articles

Metrics

Comments