Preparation and Oxygen Sensing Properties of α-Ti3O5 Thin Films

Journal of Inorganic Materials

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Preparation and Oxygen Sensing Properties of α-Ti₃O₅ Thin Films

ZHENG Liao-Ying¹; LI Guo-Rong¹; XU Ting-Xian²; YIN Qing-Rui¹

1. Laboratory of functional Inorganic Materials; Shanghai Institute of Ceramics; Chinese Academy of Sciences; Shanghai 200050; China; 2. School of Materials and Engineering; Tianjin University; Tianjin 300072; China

Received:1900-01-01 Revised:1900-01-01 Published:2002-11-20 Online:2002-11-20

Abstract

Abstract: The preparation and oxygen-sensing properties of α-Ti₃O₅ films were studied. The results of testing show that the Ti₃O₅ film with orthorhombic structure (α phase) can be obtained by reduction TiO₂ thin films in H₂atmosphere. The α-Ti₃O₅ film is stable up to 650℃ in air. It has low resistance-temperature coefficient and certain oxygen-sensing properties, but its oxygen-sensing properties need further improvement.

Key words: α-Ti₃O₅, film, reduction, oxygen sensing

CLC Number:

TB383
O484

ZHENG Liao-Ying,LI Guo-Rong,XU Ting-Xian,YIN Qing-Rui. Preparation and Oxygen Sensing Properties of α-Ti₃O₅ Thin Films[J]. Journal of Inorganic Materials.

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Preparation and Oxygen Sensing Properties of α-Ti₃O₅ Thin Films

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