Abstract: Patterned and well-aligned carbon nanotube (CNT) arrays were synthesized by chemical vapor deposition on quartz glass with notches or sputtered Au film.
Ferrocene was used to produce Fe catalyst particles, and xylene was selected as the hydrocarbon source. Scanning electron microscopy (SEM) and transmission
electron microscopy (TEM) examinations show that the arrays are in ordered patterns, in which the CNTs are muti-walled CNTs in good alignment with diameter about 20～50 nm.
The influences of substrate materials on the aligned CNTs were analyzed, and the formation mechanism of patterned arrays was discussed. Patterned CNT arrays
have potential applications in many fields such as, flat panel displays, micro-electronic devices, nanocomposites, etc.

Key words: carbon nanotubes, patterned growth, chemical vapor deposition, aligned array