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通孔氧化铝模板的强脉冲电化学剥离研究

高禄梅1,2; 王胖胖1; 吴小清2; 宋晓平1   

  1. 1. 西安交通大学理学院, 西安 710049; 2. 西安交通大学电子与信息工程学院, 西安 710049
  • 收稿日期:2004-10-26 修回日期:2005-01-21 出版日期:2005-11-20 网络出版日期:2005-11-20

Electro-chemical Detachment Process of Through-hole Porous Anodic Alumina Membrane

GAO Lu-Mei1,2; WANG Pang-Pang1; WU Xiao-Qing2; SONG Xiao-Ping1   

  1. 1. School of Science; Xi an Jiaotong University; Xi an 710049, China; 2. School of Electronic & Information Engineering, Xi'an Jiaotong University, Xi'an 71..49, China
  • Received:2004-10-26 Revised:2005-01-21 Published:2005-11-20 Online:2005-11-20

摘要: 利用0.3mol·L-1的草酸电解液,采用二步恒压阳极氧化法(30-50V)在高纯铝片上获得了高度有序的多孔氧化铝模板,利用HClO4-CH3OH混合溶液为电解液,利用还原反应产生的气体压力将多孔氧化铝膜从铝基底上剥离,获得了大面积(2cm×2cm)均匀无裂的多孔氧化铝的通孔模板,厚度为30-100μm;分析了影响孔径和阻挡层的因素和模板电化学剥离的机理;与其他剥离方法相比,该方法具有工艺简单、周期短、模板溶解少、无污染、模板韧性好, 可获得大面积均匀无裂膜,在纳米结构组装体系研究方面具有重要的实用价值.

关键词: 多孔氧化铝模板, 阳极氧化法, 纳米结构

Abstract: A well-ordered porous anodic alumina (PAA) membrane was achieved by anodic oxidization of the aluminium electrode at constant voltages of 30-50V in a solution of 0.3mol·L-1 H2C2O4. A new electrical detachment process was carried out to detach the PAA membranes from aluminium base in the solution of HClO4 and CH3OH. The mechanism of the electrical detachment process and the factors of the pore diameter and thickness of the barrier layer were researched. A larger size of PAA (2cm×2cm) was obtained with thickness of 30-100μm and full-controlled open-hole pores. Compared with reported chemical process, the present method is nore simple and rapid and free of metal ions residuce. It is important for research of nanostructure assembling techniques.

Key words: porous anodic alumina membranes, anodic oxidization, nanostructure

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