可用于快速高温热处理的多束激光并行加热系统

doi:10.15541/jim20210194

无机材料学报 ›› 2022, Vol. 37 ›› Issue (1): 107-112.DOI: 10.15541/jim20210194

• 研究快报 • 上一篇

可用于快速高温热处理的多束激光并行加热系统

徐小科¹(), 邓明雪¹^,², 刘茜¹^,²(), 余建定¹^,², 周真真¹, 张翔¹^,², 贺欢¹

1.中国科学院上海硅酸盐研究所, 高性能陶瓷和超微结构国家重点实验室, 上海 200050
2.中国科学院大学材料科学与光电研究工程中心, 北京 100049

收稿日期:2021-03-21 修回日期:2021-05-03 出版日期:2022-01-20 网络出版日期:2021-06-10
通讯作者: 刘茜, 研究员. E-mail: qianliu@mail.sic.ac.cn
作者简介:徐小科(1984–), 男, 助理研究员. E-mail: xuxiaoke@mail.sic.ac.cn
基金资助:
National Key Research and Development Program of China(2016YFB0700204);National Key Research and Development Program of China(2018YFB0704103)

Advanced Multi-laser-beam Parallel Heating System for Rapid High Temperature Treatment

XU Xiaoke¹(), DENG Mingxue¹^,², LIU Qian¹^,²(), YU Jianding¹^,², ZHOU Zhenzhen¹, ZHANG Xiang¹^,², HE Huan¹

1. State Key Laboratory of High Performance Ceramics and Superfine Microstructure, Shanghai Institute of Ceramics, Chinese Academy of Sciences, Shanghai 200050, China
2. Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing 100049, China

Received:2021-03-21 Revised:2021-05-03 Published:2022-01-20 Online:2021-06-10
Contact: LIU Qian, professor. E-mail: qianliu@mail.sic.ac.cn
About author:XU Xiaoke(1984–), male, assistant professor. E-mail: xuxiaoke@mail.sic.ac.cn

摘要/Abstract

摘要：

快速、高通量的实验方法对材料基因工程技术的发展具有重要意义。高温热处理对无机非金属材料的制备往往是必不可少的环节, 然而针对材料基因工程所需的材料样品库快速热处理技术目前尚是空白。本文报道了一种可用于快速高温热处理阵列样品的多束激光并行加热系统, 介绍了多束激光并行加热系统的设计原理、工作方式、结构细节和软件设计。该装置具有激光加热时间、功率、光斑大小可独立调节、自动化程度高等优点, 最大单束激光功率大于100 W, 每束激光的最大稳定加热温度约为2000 ℃。作为典型的应用示范, 进行了一系列Ce³⁺掺杂钇铝石榴石发光陶瓷的烧结实验,加热温度分别为1400、1500和1600 ℃, 保温时间分别为180、360和540 s, 仪器按照设置好的加热位置和加热曲线自动运行。结果表明: 采用多束激光并行加热系统, 可以在几分钟的热处理时间内获得结晶度和发光性能良好的烧结样品, 比传统制备工艺十余小时的烧结时间大幅缩短。这将为高温热处理的条件筛选和高通量制备提供一种节能省时的新技术方案。

关键词: 多束激光, 快速并行加热, 阵列样品, 独立控制, YAG:Ce

Abstract:

Rapid and high-throughput experimental methods are of great significance to the development of material genetic engineering technology. High temperature heat treatment is a necessary part for the preparation of inorganic non-metallic materials, while the rapid heat treatment technology of materials library needed for material genetic engineering is still blank. Here we report the multi-laser-beam parallel heating system which can be used in rapid high temperature treatment for samples arranged in an array of {A´B}, named as materials library. We introduce the design principle, operation mode, structure details, and software of the multi-laser-beam parallel heating system. The facility presents many advantages of independent adjustment of laser heating time, power and spot size for each beam and high automation. The maximum laser power is above 100 W, and the maximum stable heating temperature is ~2000 ℃ for each laser beam. As a typical application demonstration, a series of sintering experiments of Y₃Al₅O₁₂:Ce (YAG:Ce) luminescent ceramics were carried out. Their heating temperature was 1400 ℃, 1500 ℃ and 1600 ℃, while their holding time was 180, 360 and 540 s, respectively. Above facility operated automatically according to the pre-set heating positions and heating curves. All results show that, using the multi-laser-beam parallel heating system, fully-sintered samples with good crystallinity and luminescence properties can be obtained within several minute heat treatment, while the conventional sintering technology needs more than 10 h. This study may provide a new technical solution for processing condition screening and high-throughput preparation of multi-samples in an energy and time saving mode.

Key words: multi laser beam, rapid parallel heating, sample array, independent control, YAG:Ce

中图分类号:

TQ174

徐小科, 邓明雪, 刘茜, 余建定, 周真真, 张翔, 贺欢. 可用于快速高温热处理的多束激光并行加热系统[J]. 无机材料学报, 2022, 37(1): 107-112.

XU Xiaoke, DENG Mingxue, LIU Qian, YU Jianding, ZHOU Zhenzhen, ZHANG Xiang, HE Huan. Advanced Multi-laser-beam Parallel Heating System for Rapid High Temperature Treatment[J]. Journal of Inorganic Materials, 2022, 37(1): 107-112.

图/表 6

Fig. 1 Schematic diagram of a typical three-laser-beam parallel heating system, mainly including laser sources, reflectors, sample library holder and moving platform, computer, and controllers

Fig. 2 Photograph of various parts in the typical three-laser- beam parallel heating system (a) Overall appearance; (b) Upper part, including 3 laser sources, 3 beam expanders and 3 reflectors; (c) Middle part, mainly containing 3 thermometers, 3 infrared cameras, 1 chamber and 1 sample library holder/moving platform

Fig. 3 Software interface of the multi-laser-beam parallel heating system (a) Main window; (b) Programming window; (c) Moving platform control; (d) Laser power control; (e) Single channel (one-laser-beam) mode

Fig. 4 (a) Screenshot of the Heating-Platform software during three-laser-beam parallel heating process with heating curves and heating spots, and (b) real time observation images of heating spots during laser heating with increasing of temperature and holding time

Fig. 5 (a) XRD patterns of the YAG:Ce samples after laser heating with different temperatures and holding time, and (b) XRD patterns of solid-state sintering Ce-doped Y3Al5O12 nanopowders for comparison[20]

Fig. 6 PL spectra of the YAG:Ce ceramic samples after laser heating under varied conditions with the exciting wavelength at 450 nm Inset: PL spectra of solid-state sintering Ce-doped Y3Al5O12 nanopowders at 442 nm excitation wavelength[20]

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可用于快速高温热处理的多束激光并行加热系统

Advanced Multi-laser-beam Parallel Heating System for Rapid High Temperature Treatment

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