添加BaTiO3的热压烧结Si3N4陶瓷的力学和介电性能

doi:10.15541/jim20200211

无机材料学报 ›› 2021, Vol. 36 ›› Issue (5): 535-540.DOI: 10.15541/jim20200211

添加BaTiO₃的热压烧结Si₃N₄陶瓷的力学和介电性能

梁汉琴(), 尹金伟, 左开慧, 夏咏锋, 姚冬旭, 曾宇平()

中国科学院上海硅酸盐研究所, 高性能陶瓷和超微结构国家重点实验室, 上海 200050

收稿日期:2020-04-21 修回日期:2020-07-12 出版日期:2021-05-20 网络出版日期:2021-04-19
通讯作者: 曾宇平, 研究员. E-mail: yuping_zeng@mail.sic.ac.cn
作者简介:梁汉琴(1987-), 男, 副研究员. E-mail:hqliang@mail.sic.ac.cn

Mechanical and Dielectric Properties of Hot-pressed Si₃N₄ Ceramics with BaTiO₃ Addition

LIANG Hanqin(), YIN Jinwei, ZUO Kaihui, XIA Yongfeng, YAO Dongxu, ZENG Yuping()

State Key Lab of High Performance Ceramics and Superfine Microstructure, Shanghai Institute of Ceramics, Chinese Academy of Sciences, Shanghai 200050, China

Received:2020-04-21 Revised:2020-07-12 Published:2021-05-20 Online:2021-04-19
Contact: ZENG Yuping, professor.E-mail: yuping_zeng@mail.sic.ac.cn
About author:LIANG Hanqin(1987-), male, associate professor. E-mail:hqliang@mail.sic.ac.cn
Supported by:
National Natural Science Foundation of China(51902327)

摘要/Abstract

摘要：

本研究以Al₂O₃和Nd₂O₃为烧结助剂, 采用热压烧结法制备Si₃N₄陶瓷, 系统研究了添加BaTiO₃对Si₃N₄陶瓷力学和介电性能的影响。研究结果表明, 随着BaTiO₃含量的增加, 相对密度、抗弯强度和维氏硬度都随之降低, 而断裂韧性有所升高; 即使添加5wt%~20wt%的BaTiO₃, Si₃N₄陶瓷的抗弯强度依然可以保持在600 MPa以上。Si₃N₄陶瓷的介电常数可以提高到9.26~11.50, 而介电损耗保持在10^-3量级。在Si₃N₄陶瓷中未检测到BaTiO₃结晶相, 可以认为Si₃N₄陶瓷介电常数的提高主要来源于烧结过程中形成的TiN。这些结果有助于拓展Si₃N₄陶瓷的应用领域。

关键词: 氮化硅, 断裂韧性, 抗弯强度, 介电常数, 热压烧结

Abstract:

Si₃N₄ ceramics with improved and tailorable dielectric constant are desirable for microwave dielectric substrate application in harsh environment. Effect of BaTiO₃ addition on the mechanical and dielectric properties of the hot-pressed Si₃N₄ ceramics with Al₂O₃ and Nd₂O₃ as sintering additives were investigated. Relative density, flexural strength and Vickers’ hardness of Si₃N₄ ceramics all decreased, while indentation fracture toughness increased monotonically with the increase of BaTiO₃ content. Flexural strength of Si₃N₄ ceramics was higher than 600 MPa and dielectric constant of Si₃N₄ ceramics increased to 9.26-11.50 when 5wt%-20wt% of BaTiO₃ was added. The dielectric loss was at the level of 10^-3. The improvement of dielectric constant was attributed to the formation of TiN during hot pressing, as crystalline BaTiO₃ was not detected in the sintered samples. These findings can make a significant contribution to the new applications of Si₃N₄ ceramics.

Key words: Si₃N₄, fracture toughness, flexural strength, dielectric constant, hot pressing

中图分类号:

TQ174

梁汉琴, 尹金伟, 左开慧, 夏咏锋, 姚冬旭, 曾宇平. 添加BaTiO₃的热压烧结Si₃N₄陶瓷的力学和介电性能[J]. 无机材料学报, 2021, 36(5): 535-540.

LIANG Hanqin, YIN Jinwei, ZUO Kaihui, XIA Yongfeng, YAO Dongxu, ZENG Yuping. Mechanical and Dielectric Properties of Hot-pressed Si₃N₄ Ceramics with BaTiO₃ Addition[J]. Journal of Inorganic Materials, 2021, 36(5): 535-540.

图/表 6

Fig. 1 XRD patterns of the hot-pressed Si3N4 ceramics with 5wt%-20wt% BaTiO3

Fig. 2 Microstructure images of the Si3N4 specimens sintered with (a) 5wt%, (b) 10wt%, (c) 15wt% and (d) 20wt% BaTiO3

Fig. 3 Relative densities and flexural strength of the hot-pressed Si3N4 ceramics varying with the addition of BaTiO3

Fig. 4 Influence of BaTiO3 addition on the indentation fracture toughness and Vickers’ hardness of the hot-pressed Si3N4 ceramics

Fig. 5 Toughening mechanisms induced by the addition of BaTiO3 to the hot-pressed Si3N4 ceramics (a) 5wt%; (b) 10wt%; (c) 15wt%; (d) 20 wt%

Fig. 6 Change of dielectric constant and dielectric loss with frequency for the hot-pressed Si3N4 ceramics with different BaTiO3 additions

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添加BaTiO₃的热压烧结Si₃N₄陶瓷的力学和介电性能

Mechanical and Dielectric Properties of Hot-pressed Si₃N₄ Ceramics with BaTiO₃ Addition

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