基于ZnO复合材料的芯片式pH和温度传感器

doi:10.15541/jim20190222

无机材料学报 ›› 2020, Vol. 35 ›› Issue (4): 416-422.DOI: 10.15541/jim20190222

所属专题： 2020年能源材料论文精选(三) :太阳能电池、热电材料及其他

基于ZnO复合材料的芯片式pH和温度传感器

张伟¹,高鹏²(),侯成义¹,李耀刚¹,张青红¹,王宏志¹()

1. 东华大学材料科学与工程学院, 上海 201620
2. 中国电子科技集团公司第十八研究所, 天津 300110

收稿日期:2019-05-13 修回日期:2019-09-03 出版日期:2020-04-20 网络出版日期:2019-09-18
作者简介:张伟(1991-), 男, 博士研究生. E-mail: zhangwei0901@hotmail.com
基金资助:
上海市“科技创新行动计划”基础领域重大项目(16JC1400700);中央高校基本科研业务费专项资金(2232019A3- 02);东华大学励志计划(LZB2019002);东华大学博士创新基金(17D310611)

Chip Sensor for pH and Temperature Monitoring Based on ZnO Composite

ZHANG Wei¹,GAO Peng²(),HOU Chengyi¹,LI Yaogang¹,ZHANG Qinghong¹,WANG Hongzhi¹()

1. College of Materials Science and Engineering, Donghua University, Shanghai 201620, China
2. China Electronics Technology Group Corporation Eighteenth Institute, Tianjin 300110, China

Received:2019-05-13 Revised:2019-09-03 Published:2020-04-20 Online:2019-09-18
Supported by:
Science and Technology Commission of Shanghai Municipality(16JC1400700);Fundamental Research Funds for the Central Universities(2232019A3- 02);DHU Distinguished Young Professor Program(LZB2019002);DHU Ph.D. Candidate Research Innovation fund(17D310611)

摘要/Abstract

摘要：

可穿戴传感器可以方便地监测汗液pH、体表温度等信号, 以此判断人体的健康状况, 因而吸引了广泛注意。本研究制备了一种用于检测人体皮肤表面温度及汗液pH的芯片式传感器。pH传感器为ZnO/聚苯胺(PAni)微纳米结构, 在不同pH溶液中的表面电位不同, 灵敏度达120 mV/pH。温度传感器为ZnO/还原氧化石墨烯(rGO)复合材料, 用简单的滴落涂布法在聚对苯二甲酸乙二醇酯/氧化铟锡(PET/ITO)导电电极表面修饰一层ZnO/rGO。随着温度的升高, ZnO/rGO复合材料的电阻下降, 其电阻变化量的灵敏度达-0.67%/℃。两种传感材料可以集成在一个微小的芯片上, 获得的多功能传感器表现出较高的稳定性, 在皮肤表面pH和温度检测方面具有潜在的应用价值。

关键词: pH传感, 温度传感, ZnO/还原氧化石墨烯(rGO), ZnO/聚苯胺

Abstract:

Wearable sensors which can evaluate the health status of the human body by conveniently monitoring human’s pH of sweat and body temperature have attracted wide attention. Here, sensors for sweat pH and skin temperature monitoring were developed. ZnO/polyaniline (PAni) micro-nano structure which sensitivity reaches 120 mV/pH realized pH sensing by monitoring the change of surface potential in solutions under different pH conditions. A layer of ZnO/rGO on surface of polyethylene glycol terephthalate/indium tin oxid (PET/ITO) was constructed for temperature monitoring by a simple drop-casting method. With the temperature increasing, the resistance of ZnO/rGO composite decreases, and the sensitivity of its resistance variation reaches -0.67%/℃. Two sensors are integrated into one sensor chip which shows high stability. Therefore, the new sensor with practical and commercial potential is promising in the field of pH and temperature detection.

Key words: pH sensing, temperature sensing, ZnO/reduced graphene oride, ZnO/polyaniline

中图分类号:

TQ174

张伟,高鹏,侯成义,李耀刚,张青红,王宏志. 基于ZnO复合材料的芯片式pH和温度传感器[J]. 无机材料学报, 2020, 35(4): 416-422.

ZHANG Wei,GAO Peng,HOU Chengyi,LI Yaogang,ZHANG Qinghong,WANG Hongzhi. Chip Sensor for pH and Temperature Monitoring Based on ZnO Composite[J]. Journal of Inorganic Materials, 2020, 35(4): 416-422.

图/表 12

图1 (a)pH与温度传感器的数码照片和(b)结构示意图

Fig. 1 (a) Digital photograph and (b) schematic diagram of pH and temperature sensor

图2 ZnO纳米棒阵列制备的装置示意图

Fig. 2 Schematic diagram of apparatus prepared with ZnO nanorod arrays

图3 还原态聚苯胺与翠绿亚胺氧化态间的可逆转变

Fig. 3 Reversible transform between reduced polyaniline and emeraldine

图4 (a, b)在PET/ITO表面制备的ZnO纳米棒阵列, (c, d)在ZnO纳米棒表面制备的PAni纳米片阵列的FE-SEM照片

Fig. 4 FE-SEM images of (a, b) ZnO nanorod arrays on the surface of PET/ITO, (c, d) PAni nanosheet arrays on the surface of ZnO nanorods

图5 (a)纯PET/ITO薄膜, (b)修饰了ZnO纳米棒阵列的PET/ITO薄膜, (c)修饰了ZnO/PAni微纳米结构的PET/ITO薄膜的数码照片

Fig. 5 Digital photographs of (a) pure PET/ITO films, (b) PET/ITO films modified with ZnO nanorod arrays and (c) PET/ITO films modified with ZnO/PAni micro-nanostructures

图6 (a)100 s内不同pH溶液中工作电极表面电位随时间的变化图; (b)工作电极表面电位随pH变化的拟合曲线

Fig. 6 (a) Time dependence of the open circuit potential between work electrode and reference electrode in various solutions with different pH with in 100 s, and (b) variation of open circuit potential versus pH for work electrode

图7 ZnO/rGO的FE-TEM照片(a, b)及其Zn(c)、C(d)元素面扫描分布图

Fig. 7 FE-TEM images (a, b) of ZnO/rGO, and corresponding element mapping of (c) Zn and (d) C

图8 ZnO/rGO的XRD图谱

Fig. 8 XRD pattern of ZnO/rGO

图9 ZnO/rGO纳米复合材料的电阻随温度的(a)变化曲线和(b)百分比变化曲线

Fig. 9 (a) Variation and (b) percentage variation of resistance versus temperature for ZnO/rGO nanocomposites

表1 ZnO/rGO温敏电阻的传感性能

Table 1 Resistance-temperature performance of ZnO/rGO nanocomposites

Sample	ΔR·ΔT^-1/(Ω∙℃^-1)	(Δ(ΔR·R₀^-1)·ΔT^-1/(%·℃^-1)
1	192.9	-0.63
2	147.2	-0.67
3	173.6	-0.61

图10 (a)在测试溶液中的传感器芯片的数码照片; 传感器芯片的(b)pH和(c)温度传感性能

Fig. 10 (a) Digital photo of the sensor chip in the test solution; (b) pH sensing and (c) temperature sensing performances of the sensor chip

图11 (a)修饰了ZnO/PAni微纳米结构的PET/ITO的数码照片; (b)ZnO/PAni微纳米结构的SEM照片; (c)在25和40 ℃下ZnO/rGO热敏电阻的线性伏安曲线

Fig. 10 (a) Digital photo of PET/ITO modified with ZnO/ PAni micro-nanostructure, (b) SEM image of ZnO/PAni micro- nanostructure. and (c) Linear I-V curves of ZnO/rGO thermistor measured under 25 and 40 ℃

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基于ZnO复合材料的芯片式pH和温度传感器

Chip Sensor for pH and Temperature Monitoring Based on ZnO Composite

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