SiO2纳米球的粒径均一性研究及其在硅光学共振纳米柱阵列中的应用

doi:10.15541/jim20180440

无机材料学报 ›› 2019, Vol. 34 ›› Issue (7): 734-740.DOI: 10.15541/jim20180440

SiO₂纳米球的粒径均一性研究及其在硅光学共振纳米柱阵列中的应用

彭新村^1,²,王智栋¹,曾梦丝¹,刘云¹,邹继军¹(),朱志甫¹,邓文娟¹

^1. 江西省新能源工艺及装备工程技术中心东华理工大学
^2. 教育部核技术应用工程研究中心, 南昌 330013

收稿日期:2018-09-18 修回日期:2019-01-10 出版日期:2019-07-20 网络出版日期:2019-06-26
作者简介:彭新村(1982-), 男, 讲师. E-mail:xcpeng@ecit.cn
基金资助:
国家自然科学基金(11875012);国家自然科学基金(61204071);江西省新能源工艺及装备工程技术研究中心开放基金(JXNE2018-05)

Improvement on Size Uniformity of SiO₂ Nanospheres Applied in Si Optical Resonance Nanopillar-arrays

PENG Xin-Cun^1,²,WANG Zhi-Dong¹,ZENG Meng-Si¹,LIU Yun¹,ZOU Ji-Jun¹(),ZHU Zhi-Fu¹,DENG Wen-Juan¹

^1. Engineering Research Center of New Energy Technology of Jiangxi Province, East China University of Technology, Nanchang 330013, China
^2. Engineering Research Center of Nuclear Technology Application, Ministry of Education, East China University of Technology Nanchang 330013, China

Received:2018-09-18 Revised:2019-01-10 Published:2019-07-20 Online:2019-06-26
Supported by:
National Natural Science Foundation of China(11875012);National Natural Science Foundation of China(61204071);Opening Foundation of Engineering Research Center of New Energy Technology of Jiangxi Province(JXNE2018-05)

摘要/Abstract

摘要：

近年来, 半导体纳米结构材料的光学共振效应作为一种重要的光调控手段被广泛应用于各类光电子器件。本文用改进的两步Stober法制备了粒径在270~330 nm之间的单分散二氧化硅纳米球, 通过优化工艺参数有效改善了纳米球的粒径均一性。采用恒温加热蒸发引诱自组装方法将纳米球在硅半导体上自组装成单层膜作为掩膜, 采用感应耦合等离子体技术刻蚀制备了硅纳米柱阵列并测试了其光反射谱。光谱结果表明直径在300~325 nm之间的硅纳米柱阵列可以激发四极子Mie光学共振, 其在可见光波段的最低反射率低于5%, 具有良好的光调控性能。

关键词: 自组装纳米球, 纳米阵列, 光学共振

Abstract:

Recently, optical resonances of nanostructured semiconductor were proved highly effective for light management in many optoelectronic devices. In this work, the monodispersed silica nanospheres with particle sizes of 270-330 nm were synthesized by modified two-step Stober method, and the nanosphere size uniformity was improved by optimizing the synthesis conditions. Then, the as-prepared nanospheres were self-assembled into monolayer as etching mask on the silicon substrate by means of constant temperature heating and evaporation. Finally, Si nanopillar-arrays were fabricated by inductively coupled plasma etching. The light reflectance spectra show that the fabricated Si nanopillar-arrays with diameters of 300-325 nm can excite the quadrupole Mie resonance, and the reflectance of lower than 5% was obtained in visible wavelengths, which show excellent light management performances and can further match the requirements of actual optoelectronic devices.

Key words: self-assembly nanosphere, nanopillar-array, optical resonance

中图分类号:

TN204

彭新村, 王智栋, 曾梦丝, 刘云, 邹继军, 朱志甫, 邓文娟. SiO₂纳米球的粒径均一性研究及其在硅光学共振纳米柱阵列中的应用[J]. 无机材料学报, 2019, 34(7): 734-740.

PENG Xin-Cun, WANG Zhi-Dong, ZENG Meng-Si, LIU Yun, ZOU Ji-Jun, ZHU Zhi-Fu, DENG Wen-Juan. Improvement on Size Uniformity of SiO₂ Nanospheres Applied in Si Optical Resonance Nanopillar-arrays[J]. Journal of Inorganic Materials, 2019, 34(7): 734-740.

图/表 6

图1 自组装纳米球刻蚀法制备Si纳米柱阵列的工艺流程

Fig. 1 Fabrication process of Si nanopillar-arrays by self- assembled nanosphere etching

图2 两步Stober法合成单分散SiO2纳米球的工艺流程

Fig. 2 Fabrication process of the monodisperse SiO2 nanospheres by two-step Stober method

图3 (a) 氨水用量对纳米球粒径分布的影响曲线; (b) TEOS用量对纳米球粒径分布的影响曲线; (c) SEM照片中出现的纳米球融合现象; (d) 最佳条件下纳米球种子溶液的粒径分布曲线

Fig. 3 (a) Effect of ammonia amount on particle size distribution of nanospheres; (b) Effect of TEOS amount on particle size distribution of nanospheres; (c) Fusion of the nanospheres found in the SEM image; (d) Particle size distribution of the SiO2 nanosphere seed solution under the optimized synthesis condition

图4 两步法中最后一步的反应时间对SiO2纳米球均一性的影响: (a)1 h, (b)2 h, (c)3 h, (d)4 h, (e)5 h; (f)SiO2纳米球的粒径及其分布特性随反应时间的变化曲线; (g)反应时间为4 h的SiO2纳米球的SEM照片

Fig. 4 Effect of the last-step reaction time of the two-step Stober method on uniformity of SiO2 nanospheres: (a) 1 h, (b) 2 h, (c) 3 h, (d) 4 h, (e) 5 h ; (f) Dependence of the average particle size and its distribution on reaction time; (g) SEM image of the SiO2 nanospheres with reaction time of 4 h

图5 (a) Si表面单层SiO2纳米球的SEM照片; (b) Si纳米柱阵列的顶面SEM照片; (c) Si纳米柱阵列的侧面SEM照片

Fig. 5 (a) SEM image of the single-layer SiO2 nanosphere on Si substrate (top view) and SEM images of the Si nanopillar-arrays from (b) top view and (c) side view

图6 Si纳米柱阵列的光学测试结果: (a)测试微区照片; (b)表面光反射谱图

Fig. 6 (a) Measured area for the light reflectance spectrum and (b) surface reflectance spectra of Si nanopillar-array samples

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SiO₂纳米球的粒径均一性研究及其在硅光学共振纳米柱阵列中的应用

Improvement on Size Uniformity of SiO₂ Nanospheres Applied in Si Optical Resonance Nanopillar-arrays

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