无机材料学报 ›› 2018, Vol. 33 ›› Issue (3): 284-288.DOI: 10.15541/jim20170179

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铝酸盐体系下反应时间对ZrH1.8表面阻氢膜层制备的影响

张鹏飞1, 2, 闫淑芳1, 陈伟东1, 李世江1, 赵丽1, 王宏兴2   

  1. 1. 内蒙古工业大学 材料科学与工程学院, 呼和浩特 010051;
    2. 西安交通大学 宽禁带半导体材料与器件研究中心, 西安 710049
  • 收稿日期:2017-04-17 修回日期:2017-06-06 出版日期:2018-03-20 网络出版日期:2018-03-12
  • 作者简介:张鹏飞(1992-), 男, 硕士研究生. E-mail: pfzhang.kk@foxmail.com
  • 基金资助:
    国家自然科学基金(51164023, 51364026);内蒙古自然科学基金(2016MS0505);内蒙古工业大学科学研究项目(X201410)

Influence of Reaction Time on Hydrogen Resistance Film on the Surface of ZrH1.8 in Aluminate System

ZHANG Peng-Fei1, 2, YAN Shu-Fang1, CHEN Wei-Dong1, LI Shi-Jiang1, ZHAO Li1, WANG Hong-Xing2   

  1. 1. College of Materials Science and Engineering, Inner Mongolia University of Technology, Hohhot 010051, China;
    2. Institute of Wide Band Gap Semiconductors, Xi'an Jiaotong University, Xi'an 710049, China;
  • Received:2017-04-17 Revised:2017-06-06 Published:2018-03-20 Online:2018-03-12
  • About author:ZHANG Peng-Fei. E-mail: pfzhang.kk@foxmail.com
  • Supported by:
    National Natural Science Foundation of China (51164023, 51364026);Natural Science Foundation of Inner Mongolia Autonomous Region (2016MS0505);Science Project of Inner Mongolia University of Technology (X201410)

摘要:

采用微弧氧化技术在NaAlO2电解液体系下制备ZrH1.8表面阻氢膜层, 采用场发射扫描电子显微镜(FE-SEM), X射线衍射(XRD), 真空脱氢实验对膜层进行表征, 考察不同反应时间对ZrH1.8表面阻氢膜层的厚度、形貌、相结构以及阻氢性能的影响规律。研究结果表明:当反应时间在7.5~15 min变化时, 膜层厚度由78.4 μm增大至152.8 μm。膜层由单斜相M-ZrO2、四方相T-ZrO2以及立方相C-ZrO2组成, 反应时间对膜层的相组成并无明显影响。阻氢膜层由致密层和疏松层构成, 膜层外侧为疏松层, 靠近基体一侧为致密层。当反应时间为10 min时, 获得的膜层表面平整, 致密性较好, 厚度适中, 膜层的氢渗透降低因子PRF值为20。

 

关键词: ZrH1.8, 微弧氧化技术, 反应时间, 氧化膜

Abstract:

Micro-arc oxidation process was conducted on ZrH1.8 in the electrolyte composed of NaAlO2 to fabricate hydrogen resistance film. The as-prepared film was then characterized by field emission scanning electron microscope (FE-SEM), X-ray diffraction (XRD), and vacuum dehydrogenation experiment. The influences of reaction time on thickness, micro-morphology, structure, and hydrogen resistance properties of the hydrogen resistance film on the surface of ZrH1.8 were investigated. The results show that the thickness of the surface film increases from 78.4 μm to 152.8 μm with the oxidation time changing from 7.5 min to 15 min. The film is composed of M-ZrO2, T-ZrO2 and C-ZrO2, and the oxidation time has no obvious influence on its structure. The film comprises of an exterior loose layer and an interior layer by substrate. When the oxidation time is 10 min, the obtained film is compact and uniform, and has a moderate thickness, showing an excellent hydrogen permeation resistance, of which the Permeation Reduction Factor (PRF) value reaches up to the maximum of 20.

Key words: zirconium hydride, micro-arc oxidation technology, reaction time, oxide film

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