硼含量对碳硼化合物结构、力学影响行为研究

doi:10.15541/jim20170069

无机材料学报 ›› 2017, Vol. 32 ›› Issue (11): 1228-1232.DOI: 10.15541/jim20170069

• 研究快报 • 上一篇

硼含量对碳硼化合物结构、力学影响行为研究

乔振杰^1,2,3,4, 高乐^1,2, 冯倩⁵, 胡建宝^1,2, 董绍明^1,2, 马良来^1,2,3

1. 中国科学院上海硅酸盐研究所, 高性能陶瓷和超微结构国家重点实验室, 上海 200050;
2. 中国科学院上海硅酸盐研究所, 结构陶瓷与复合材料工程研究中心, 上海 200050;
3. 中国科学院大学, 北京 100049;
4. 上海科技大学物质科学与技术学院, 上海 201210;
5. 东华大学分析测试中心, 上海 201620

收稿日期:2017-02-14 出版日期:2017-11-20 网络出版日期:2017-10-20

Boron Content on Microstructure and Mechanical Properties of Amorphous Boron Carbide by Chemical Vapor Deposition

QIAO Zhen-Jie^1,2,3,4, GAO Le^1,2, FENG Qian⁵, HU Jian-Bao^1,2, DONG Shao-Ming^1,2, MA Liang-Lai^1,2,3

1. State Key Laboratory of High Performance Ceramics and Superfine Microstructure, Shanghai Institute of Ceramics, Chinese Academy of Sciences, Shanghai 200050, China;
2. Structural Ceramics and Composites Engineering Research Center, Shanghai Institute of Ceramics, Chinese Academy of Sciences, Shanghai 200050, China;
3. University of Chinese Academy of Sciences, Beijing 100049, China;
4. School of Physical Science and Technology, Shanghai Tech University, Shanghai 201210, China;
5. Analysis and Testing Center, Donghua University, Shanghai 201620, China

Received:2017-02-14 Published:2017-11-20 Online:2017-10-20
About author:QIAO Zhen-Jie (1991-), male, candidate of Master degree. E-mail:qiaozhj@shanghaitech.edu.cn
Supported by:
National Natural Science Foundation of China (51502323);Shanghai Natural Science Foundation (14ZR1445800);Shanghai Key Project of Basic Research (14JC1406200);Science Foundation for Youth Scholar of State Key Laboratory of High Performance Ceramics and Superfine Microstructures (SKL201601)

摘要/Abstract

摘要：

利用低压化学气相沉积技术, 以BCl₃-C₃H₆-H₂为反应气体制备了不同掺硼量的热解碳薄膜B_xC_1-_x(x=0.05, 0.10, 0.16, 0.30, 0.50), 并研究了硼含量对B_xC_1-_x微观结构及力学性能的影响。B_0.1C_0.9展现了高度结晶的类石墨结构, 其中大部分B取代石墨层中的C。随着B含量上升, B主要形成B-C键, B_xC_1-_x结构向无定型转变。纳米压痕测试结果显示, B_0.1C_0.9的弹性模量和硬度较低, 载荷位移曲线显示其力学变形接近弹性变形, 随着B含量增加, 碳化硼生成量增加, 其弹性模量和硬度显著提升, 载荷位移曲线表现出典型的脆性材料力学行为。

关键词: 碳硼化合物, 微观结构, 力学性质, 低压化学气相沉积

Abstract:

Boron carbide coatings B_xC_1-_x (x=0.05, 0.10, 0.16, 0.30, 0.50) were prepared by low pressure chemical vapor deposition technique from BCl₃-C₃H₆-H₂ precursor mixtures. The effects of boron content on the microstructure and mechanical behaviors of the B_xC_1-_x were investigated. The B_0.1C_0.9 coating displayed a graphite-like structure of high crystallinity where a large fraction of boron atoms exists as atomic substituent in the carbon layers. As boron content increased, the structure tended to be amorphous, because of the formation of increasingly numbers of B-C bonds. The B_0.1C_0.9 coating showed a low hardness and elastic modulus, and its mechanical behavior was close to that of an elastic soft film. The H and E of B_xC_1-_x coatings were significantly enhanced at high boron content level, because of the formation of increasing amounts boron carbide in them.

Key words: boron carbide, microstructure, mechanical properties, low pressure chemical vapor deposition

中图分类号:

TQ174

乔振杰, 高乐, 冯倩, 胡建宝, 董绍明, 马良来. 硼含量对碳硼化合物结构、力学影响行为研究[J]. 无机材料学报, 2017, 32(11): 1228-1232.

QIAO Zhen-Jie, GAO Le, FENG Qian, HU Jian-Bao, DONG Shao-Ming, MA Liang-Lai. Boron Content on Microstructure and Mechanical Properties of Amorphous Boron Carbide by Chemical Vapor Deposition[J]. Journal of Inorganic Materials, 2017, 32(11): 1228-1232.

图/表 7

Table 1 Boron contents of the BxC1-x coatings

B_xC_1-_x	I	II	III	IV	V
B/C	1 : 5	1 : 3	1 : 1	3 : 1	5 : 1
α (%)	37.5	50.0	75.0	90.0	93.8
B (at%)	4.9	9.6	16.3	30.5	49.5
x	0.05	0.10	0.16	0.31	0.50

Fig. 1 XRD patterns of BxC1-x coatings

Fig. 2 B1s core level spectra and fitting curves of the BxC1-x coatings

Table 2 Proportions of B1s components for the BxC1-x coatings

B_xC_1-_x	I	II	III	IV	V
a B-C in B₄C/%	26.7	23.0	9.5	50.4	75.1
b B-sub-C/%	37.0	40.2	46.3	32.0	24.9
c BC₂O/%	19.0	18.7	25.8	13.8	0
d BCO₂/%	10.7	10.8	13.3	3.8	0
e B₂O₃/%	7.3	7.3	5.2	0	0

Fig. 3 Nanostructures of BxC1-x coatings (a) Coating II; (b) Coating III; (c) Coating IV; (d) Coating V

Fig. 4 Load-displacement curves of the coatings (a) Coating II; (b) Coating III; (c) Coating IV; (d) Coating V

Table 3 Elastic modulus and hardness for the BxC1-x coatings

B_xC_1-_x	II	III	IV	V
E/GPa	46.0 ± 4.6	100.0 ± 13.3	161.2 ± 34.5	415.0 ± 41.7
H/GPa	5.66 ± 0.84	10.44 ± 2.49	15.29 ± 5.02	39.77±4.9.0

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硼含量对碳硼化合物结构、力学影响行为研究

Boron Content on Microstructure and Mechanical Properties of Amorphous Boron Carbide by Chemical Vapor Deposition

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