含稀土氧化物难熔盐浸渍W基直热式阴极研究

doi:10.15541/jim20160008

无机材料学报 ›› 2016, Vol. 31 ›› Issue (9): 987-991.DOI: 10.15541/jim20160008

含稀土氧化物难熔盐浸渍W基直热式阴极研究

漆世锴^1,2, 王小霞¹, 罗积润¹, 胡明炜^1,2, 李云¹

(1. 中国科学院电子学研究所, 高功率微波源与技术重点实验室, 北京100190; 2. 中国科学院大学, 北京100049)

收稿日期:2016-01-04 修回日期:2016-02-28 出版日期:2016-09-20 网络出版日期:2016-08-29
作者简介:漆世锴(1987–), 男, 博士研究生. E-mail: kaishiqi@126.com
基金资助:
国家重点基础研究发展计划 (2013CB328901);国家自然科学基金(11305177)

Rare Earth Oxide Refractory Metal Salt Impregnated W Based Directly-Heated Cathode

QI Shi-Kai^1,2, WANG Xiao-Xia¹, LUO Ji-Run¹, HU Ming-Wei^1,2, LI Yun¹

(1. Institute of Electronics, Chinese Academy of Sciences, Beijing 100190, China; 2. University of Chinese Academy of Sciences, Beijing 100049, China)

Received:2016-01-04 Revised:2016-02-28 Published:2016-09-20 Online:2016-08-29
About author:QI Shi-Kai. E-mail: kaishiqi@126.com
Supported by:
State Key Development Program for Basic Research of China (2013CB328901);National Natural Science Foundation of China (11305177)

摘要/Abstract

摘要：

为了提高磁控管阴极的工作性能, 采用新型La₂O₃/Y₂O₃-Gd₂O₃-ZrO₂难熔盐浸渍W基制备直热式阴极, 并对该阴极的热发射特性和寿命特性等进行了测试。热发射测试结果表明, La₂O₃-Gd₂O₃-ZrO₂浸渍阴极在1600℃可提供超过0.18 A/cm²的空间电荷限制区电流密度。在同等发射电流下, 该浸渍阴极的工作温度比纯W阴极降低至少300℃, 该阴极在1750℃, 0.5 A/cm²直流负载下, 可以连续工作2100 h。当以Y₂O₃代替La₂O₃, 采用相同的配比制备阴极时, 1400℃、1700℃下即可分别提供超过0.6、3.4 A/cm²的空间电荷限制区电流密度。Y₂O₃-Gd₂O₃-ZrO₂浸渍阴极的工作温度比La₂O₃-Gd₂O₃-ZrO₂浸渍阴极降低至少400℃, 该阴极在1600℃, 1.5 A/cm²直流负载下, 可以连续工作2600 h。最后, 对这两种新型含稀土氧化物难熔盐浸渍阴极的热发射机理进行了探讨。

关键词: 直热式阴极, 稀土氧化物, 热发射, 寿命, 发射机理

Abstract:

Cathode plays an important role in the magnetron. In order to enhance the emission current, reduce the operation temperature and prolong the lifetime of the pure W cathode applied in the magnetron, a new La₂O₃/Y₂O₃-Gd₂O₃-ZrO₂ impregnated W based directly-heated cathode was developed. The thermionic emission properties of the La₂O₃/Y₂O₃-Gd₂O₃-ZrO₂ impregnated cathode were measured. The results show that the La₂O₃-Gd₂O₃-ZrO₂impregnated cathode can provide more than 0.18 A /cm² current density for the space charge limitation (SCL) at 1600℃. Under the same thermionic emission level, the working temperature of the La₂O₃-Gd₂O₃-ZrO₂impregnated cathode is at least 300℃ lower than that of the pure W cathode. Lifetime of the La₂O₃-Gd₂O₃-ZrO₂ impregnated cathode reaches 2100 h at 1750℃ with dc load of 0.5 A/cm². The Y₂O₃-Gd₂O₃-ZrO₂ impregnated cathode can provide more than 0.6 and 3.4 A /cm² current density for SCL at 1400℃, 1700℃, respectively. Under the same thermionic emission level, the working temperature of the Y₂O₃-Gd₂O₃-ZrO₂ impregnated cathode is at least 400℃, lower than that of the La₂O₃-Gd₂O₃-ZrO₂ impregnated cathode. Lifetime of the Y₂O₃-Gd₂O₃-ZrO₂ impregnated cathode reaches 2600 h at 1600℃ with dc load of 1.5 A/cm². At last, the thermionic emission mechanisms of the two new impregnated cathodes are discussed reasonably.

Key words: directly-heated cathode, rare earth oxide, thermionic emission, lifetime, emission mechanism

中图分类号:

O462

漆世锴, 王小霞, 罗积润, 胡明炜, 李云. 含稀土氧化物难熔盐浸渍W基直热式阴极研究[J]. 无机材料学报, 2016, 31(9): 987-991.

QI Shi-Kai, WANG Xiao-Xia, LUO Ji-Run, HU Ming-Wei, LI Yun. Rare Earth Oxide Refractory Metal Salt Impregnated W Based Directly-Heated Cathode[J]. Journal of Inorganic Materials, 2016, 31(9): 987-991.

图/表 9

图1 La2O3-Gd2O3-ZrO2浸渍W基阴极伏安特性曲线

Fig. 1 I-V dc emission characteristics curves of La2O3-Gd2O3- ZrO2 impregnated cathode

图2 La2O3-Gd2O3-ZrO2浸渍W基阴极与纯W阴极温度特性曲线

Fig. 2 Thermionic electron emission density vs temperature of La2O3-Gd2O3-ZrO2 impregnated cathode and pure W cathode

图3 La2O3-Gd2O3-ZrO2浸渍W基阴极寿命特性曲线

Fig. 3 Lifetime curve of La2O3-Gd2O3-ZrO2 impregnated W based cathode

图4 Y2O3-Gd2O3-ZrO2浸渍W基阴极伏安特性曲线

Fig. 4 I-V dc emission characteristics curves of Y2O3-Gd2O3- ZrO2 impregnated W based cathode

图5 La2O3/Y2O3-Gd2O3-ZrO2浸渍阴极温度特性曲线

Fig. 5 Thermionic electron emission density versus temperature of La2O3/Y2O3-Gd2O3-ZrO2 impregnated cathode

图6 Y2O3-Gd2O3-ZrO2浸渍W基阴极寿命特性曲线

Fig. 6 Lifetime curve of Y2O3-Gd2O3-ZrO2 impregnated W based cathode

图7 La2O3-Gd2O3-ZrO2难熔盐的SEM照片(a)及其XRD图谱(b)

Fig. 7 SEM image (a) and XRD pattern (b) of La2O3-Gd2O3- ZrO2 refractory metal salt

图8 Y2O3-Gd2O3-ZrO2难熔盐的SEM照片(a)及XRD图谱(b)

Fig. 8 SEM image (a) and XRD pattern (b) of Y2O3-Gd2O3- ZrO2 refractory metal salt

表1 含La2O3/Y2O3难熔盐活性物质元素成分及含量

Table1 Element composition of the La2O3/Y2O3-Gd2O3-ZrO2

Elements	La₂O₃-Gd₂O₃-ZrO₂		Elements	Y₂O₃-Gd₂O₃-ZrO₂
Elements	at%	wt%	Elements	at%	wt%
La	13.95	38.35	Y	17.44	35.44
Gd	1.39	4.33	Gd	1.21	4.45
Zr	20.55	37.01	Zr	17.78	36.88
O	64.11	20.31	O	63.57	23.23
Total	100.00	100.00	Total	100.00	100.00

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含稀土氧化物难熔盐浸渍W基直热式阴极研究

Rare Earth Oxide Refractory Metal Salt Impregnated W Based Directly-Heated Cathode

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