液相烧结碳化硅陶瓷的原位研究

doi:10.15541/jim20150461

摘要/Abstract

摘要：

采用原位分析设备与传统方法相结合的方式研究了以Al₂O₃和Y₂O₃为烧结助剂的SiC陶瓷的液相烧结过程。通过高温实时观测炉对样品在测试过程中的收缩曲线以及形貌变化进行了表征, 以及对液相形成过程的模拟进行了观测。采用传统分析方法研究了样品的相对密度、抗弯强度、物相组成以及微结构演变从1640℃到1920℃以40℃为间隔的变化情况。研究发现, 液相明显开始起作用的温度在1640℃到1680℃之间。经典的液相烧结三阶段理论可以通过微结构以及相对密度等的分析来得到验证。该烧结体系的最佳烧结温度确认为1880℃, 最高密度为(99.46±0.37)%, 最大强度为(650±26) MPa。

关键词: 碳化硅, 液相烧结, 原位研究, 微结构

Abstract:

The densification process of liquid phase sintered SiC ceramics with Al₂O₃ and Y₂O₃ as sintering additives was investigated by in situ measurement apparatus combined with conventional methods. The shrinkage curve, morphology of the sample and liquid phase formation process simulation were observed by high temperature in-situ observation furnace. The relative density, flexural strength and microstructure evolution were characterized by analysis of samples sintered at temperatures ranging from 1640℃ to 1920℃ at 40℃ interval. The obvious temperature that liquid phase began to function was confirmed between 1640℃ to 1680℃. The classical liquid phase sintering theory was testified. Highly-densified SiC ceramics were obtained by being sintered at 1880℃, of which the relative density was (99.46 ± 0.37)%, and the flexural strength was (650 ± 26) MPa.

Key words: SiC, liquid phase sintering, in-situ measurement, microstructure

中图分类号:

TQ174

梁汉琴, 姚秀敏, 黄政仁, 曾宇平. 液相烧结碳化硅陶瓷的原位研究[J]. 无机材料学报, 2016, 31(4): 443-448.

LIANG Han-Qin, YAO Xiu-Min, HUANG Zheng-Ren, ZENG Yu-Ping. In Situ Analysis of the Liquid Phase Sintering Process of α-SiC Ceramics[J]. Journal of Inorganic Materials, 2016, 31(4): 443-448.

图/表 5

Fig. 2 Evolution of relative density and flexural strength as function of sintering temperatures

Fig. 3 XRD analysis of samples heated at temperature from 1640℃ to 1920℃

Fig. 4 SEM fracture surface micrographs of samples sintered at different temperatures (a) 1640℃; (b) 1680℃; (c) 1720℃; (d) 1760℃; (e) 1800℃; (f) 1840℃; (g) 1880℃; (h) 1920℃

Fig. 5 “Simulation” of the liquid phase composition melting and wetting process on the SiC wafer. Morphologies of six characteristic temperature points (a) 35℃; (b) 1450℃; (c) 1481℃; (d) 1582℃; (e) 1644℃; (f) 1793℃

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