分体圆柱谐振腔法用于金刚石膜微波介电性能测试的研究

doi:10.15541/jim20140629

摘要/Abstract

摘要：

针对金刚石膜微波介电损耗低、厚度薄带来的微波介电性能测试难点, 研制了一台分体圆柱谐振腔式微波介电性能测试装置。利用不同直径的蓝宝石单晶样品, 用上述装置对低损耗薄膜类样品微波介电性能的测试能力及样品直径对测试结果的影响进行了实验研究。在此基础上, 使用分体圆柱谐振腔式微波介电性能测试装置对微波等离子体化学气相沉积法和直流电弧等离子体喷射法制备的高品质金刚石膜在Ka波段的微波介电性能进行了测试比较。测试结果表明, 由Raman光谱、紫外-可见光谱等分析证明品质较优的微波等离子体化学气相沉积法制备的金刚石膜具有更高的微波介电性能, 其相对介电常数和微波介电损耗值均低于直流电弧等离子体喷射法制备的金刚石膜。

关键词: 微波介电性能, 分体圆柱谐振腔, 金刚石膜

Abstract:

Regarding to the difficulties in measuring microwave dielectric properties of diamond films due to their characteristics of low dielectric loss and small thickness, a split-cylinder resonator apparatus was established. By measuring dielectric performances of sapphire samples with different diameters, the capability of the split-cylinder resonator for measuring low dielectric loss materials was demonstrated, and the influence of sample’s diameter on measurement results was studied. Then by using the split-cylinder resonator apparatus, dielectric properties of high quality diamond films prepared by two different methods, microwave plasma chemical vapor deposition (MPCVD) and DC arc plasma jet, were measured in the Ka band. Results show that the diamond film deposited by MPCVD method has a higher quality than that of the diamond film deposited by the DC arc plasma jet method, which is consistent with the results of their Raman and UV-visible absorption spectra. The results indicate that both the relative dielectric constant and the loss tangent of the sample deposited by MPCVD method are lower than those of the sample prepared by DC arc plasma jet method.

Key words: dielectric property, split-cylinder resonator, diamond film

中图分类号:

TQ174

苏静杰, 杨梓, 李义锋, 唐伟忠, 安晓明, 郭辉. 分体圆柱谐振腔法用于金刚石膜微波介电性能测试的研究[J]. 无机材料学报, 2015, 30(7): 751-756.

SU Jing-Jie, YANG Zi, LI Yi-Feng, TANG Wei-Zhong, AN Xiao-Ming, GUO Hui. Measurement of Microwave Dielectric Properties of Diamond Films Using Split-cylinder Resonator Method[J]. Journal of Inorganic Materials, 2015, 30(7): 751-756.

图/表 8

图1 分体圆柱谐振腔式微波介电性能测试装置的示意图

Fig. 1 Schematic of the split-cylinder resonator for dielectric property measurement

图2 分体圆柱谐振腔式微波介电性能测试装置的实物图

Fig. 2 Photograph of the split-cylinder resonator for dielectric properties measurement

表1 不同直径蓝宝石单晶样品在垂直于c轴方向的微波介电性能

Table 1 Microwave dielectric properties of sapphire samples (⊥c axis) with different diameter

Diameter / mm	Frequency / GHz		tanδ /×10^-4
18.2	24.287	9.45±0.09	0.26±0.20
21.6	24.399	9.45±0.09	0.27±0.20
25.0	24.451	9.40±0.09	0.27±0.20
30.0	24.476	9.44±0.09	0.27±0.20

图3 (a) MPCVD法和(b) DC Arc Plasma Jet法制备的金刚石膜样品的照片

Fig. 3 Photos of diamond films deposited by (a) MPCVD and (b) DC Arc Plasma Jet methods

表2 MPCVD和DC Arc Plasma Jet法制备高品质金刚石膜样品的工艺条件

Table 2 Deposition conditions of the high quality diamond film prepared by two different methods

Method	Power /kW	Pressure /kPa	Flow rate /sccm	Temperature /℃
MPCVD	9.2	15.8	CH₄/H₂: 7/200	1030
DC Arc Plasma Jet	13.5	3.5	CH₄/H₂/Ar: 0.015/6/2 (in gas recycling mode)	1000

图4 (a)MPCVD法和(b) DC Arc Plasma Jet法制备的金刚石膜样品的Raman光谱图

Fig. 4 Raman spectra of the diamond films deposited by (a) MPCVD and (b) DC Arc Plasma Jet methods

图5 不同方法制备的金刚石膜样品的紫外-可见光吸收谱

Fig. 5 UV-visible absorption spectra of the diamond films deposited by different methods

表3 两种不同方法制备的金刚石膜样品的微波介电性能测试结果

Table 3 Microwave dielectric properties of the diamond films deposited by different methods

Deposition method	Frequency /GHz		tanδ /×10^-4
MPCVD	29.280	5.60±0.07	1.38±0.22
DC Arc Plasma Jet	30.004	5.77±0.09	7.49±0.66

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