退火气氛对镶嵌在SiO2中Ag纳米颗粒热演变影响效应的研究

doi:10.15541/jim20140430

摘要/Abstract

摘要：

将70 keV的Ag离子以5×10¹⁶ cm^-2的剂量注入到SiO₂基底中, 随后分别在400~800℃的Ar、N₂、空气气氛中退火, 详细研究了样品的表面形貌、光吸收特性、结构及成分随退火气氛及退火温度的变化规律。原子力显微镜、紫外-可见分光光度计及掠入射X射线衍射仪的测试结果显示: Ar气氛退火样品中形成的Ag纳米粒子(NPs)细小均匀, 其颗粒密度在700℃时达到最大值, 光吸收性能最佳; N₂气氛退火引发Ag纳米颗粒的团聚生长, 在样品近表面形成较大的Ag NPs, 其颗粒密度也在700℃时达到最大值; 而空气中退火后, 由于AgO的形成、分解, 样品的光吸收强度随退火温度升高持续下降。最后, 卢瑟福背散射研究结果表明, 样品的这些变化主要归因于Ag原子在不同退火气氛下随退火温度的扩散行为不同。

关键词: 离子注入, Ag纳米颗粒, 气氛效应, Ag扩散

Abstract:

Silver nanoparticles (NPs) were synthesized in thin surface layers of SiO₂ glass by 70 keV implantation of Ag ions at a fluence of 5×10¹⁶ cm^-2, and were then subjected to post thermal annealing in a temperature range of 400-800℃ at different atmospheres, e.g. Ar, N₂, air. The evolution of surface morphologies, optical absorption properties, as well as compositions and structures with annealing temperature in different annealing atmospheres were studied by AFM, UV-Vis spectrophotometry and GXRD. The results clearly show that uniformly distributed Ag NPs are observed in Ar ambient samples, which have high particle density and intense optical absorption at 700℃. Similar optical properties are obtained in N₂ annealed samples with larger Ag NPs. In contrast, the formation and decomposition of AgO significantly reduce optical absorption of air ambient samples. Moreover, the results of Rutherford backscattering spectroscopy reveal that the evolution of Ag particles should be ascribed to different diffusion behaviors of Ag atoms with variation of annealing temperatures and atmospheres.

Key words: ion implantation, Ag nanoparticles, atmosphere effects, diffusion of Ag atoms

中图分类号:

TQ174

乔瑜, 金腾, 于盛旺, 贺志勇, 申艳艳. 退火气氛对镶嵌在SiO₂中Ag纳米颗粒热演变影响效应的研究[J]. 无机材料学报, 2015, 30(4): 385-390.

QIAO Yu, JIN Teng, YU Sheng-Wang, HE Zhi-Yong, SHEN Yan-Yan. Effect of Annealing Atmosphere on Thermal Evolution of Ag Nanoparticles Embedded in SiO₂ Thin Surface Layers[J]. Journal of Inorganic Materials, 2015, 30(4): 385-390.

图/表 4

图1 样品注入态(a)及在(b)Ar、(c)N2、(d)空气气氛不同温度下退火后的AFM图片

Fig. 1 AFM images of samples before and after annealing at elevated temperatures under different atmospheres (a) As-implanted; (b) Annealed in Ar; (c) Annealed in N2; (d) Annealed in air

图2 Ag注入样品(a)Ar、(b)N2、(c)空气气氛中退火测得的UV-Vis光吸收谱

Fig. 2 UV-Vis optical absorption spectra of samples before and after annealing at elevated temperatures under different atmospheres (a) Annealed in Ar; (b) Annealed in N2; (c) Annealed in air

图3 样品在(a)Ar、(b)N2、(c)空气气氛中不同温度退火后得到的GXRD图谱

Fig. 3 GXRD patterns of samples before and after annealing at elevated temperatures under different atmospheres (a) Ar; (b) N2; (c) Air

图4 样品在(a) Ar、(b) N2、(c)空气气氛中不同温度退火后得到的RBS图谱

Fig. 4 RBS spectra of samples before and after annealing at elevated temperatures under different atmospheres (a) Annealed in Ar; (b) Annealed in N2; (c) Annealed in air (The insets show the corresponding magniﬁed proﬁles for clarity)

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退火气氛对镶嵌在SiO₂中Ag纳米颗粒热演变影响效应的研究

Effect of Annealing Atmosphere on Thermal Evolution of Ag Nanoparticles Embedded in SiO₂ Thin Surface Layers

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