不同基底上SiO2薄膜的显微结构和力学性能

doi:10.3724/SP.J.1077.2013.12461

无机材料学报 ›› 2013, Vol. 28 ›› Issue (06): 653-658.DOI: 10.3724/SP.J.1077.2013.12461

不同基底上SiO₂薄膜的显微结构和力学性能

王河^1,2, 贺洪波¹, 张伟丽¹

(1. 中国科学院上海光学精密机械研究所, 中国科学院强激光材料重点实验室, 上海201800; 2. 中国科学院大学北京100039)

收稿日期:2012-07-26 修回日期:2012-09-13 出版日期:2013-06-20 网络出版日期:2013-05-20
作者简介:王河(1985–), 女, 博士研究生. E-mail: wanghe@siom.ac.cn

Substrate Effects on the Microstructure and Mechanical Properties of SiO₂ Thin Films

WANG He^1,2, HE Hong-Bo¹, ZHANG Wei-Li¹

(1. Key Lab. of Materials for High Power Laser, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China; 2. University of Chinese Academy of Sciences, Beijing 100039, China)

Received:2012-07-26 Revised:2012-09-13 Published:2013-06-20 Online:2013-05-20
About author:WANG He. E-mail: wanghe@siom.ac.cn

摘要/Abstract

摘要： 用电子束蒸发技术在K9玻璃及两种不同取向的钇铝石榴石(Y₃Al₅O₁₂, 简称YAG)晶体上沉积了SiO₂薄膜, 采用X射线衍射仪和纳米划痕仪对薄膜显微结构和力学性能进行了研究。实验结果表明: 薄膜在K9 、YAG(100) 和YAG(111)基底上分别呈现非晶态和多晶态; 沉积在不同基底上的薄膜的弹性模量并无明显差异; SiO₂薄膜在K9和YAG基底上呈现不同的划痕破坏模式, 并且YAG晶体上薄膜的粘附失效临界附着力远远小于SiO₂薄膜与K9基底的附着力。本文从薄膜的结构和弹性模量两方面分析解释了不同基底上薄膜的力学行为。

关键词: SiO₂薄膜, 显微结构, 弹性模量, 附着力, K9, YAG

Abstract: The SiO₂ films deposited respectively on K9 and two different orientations of Y₃Al₅O₁₂ (YAG) crystals were manufactured by electron beam technology. X-ray diffraction (XRD) and nano-scratch tests were used to demonstrate the microstructures and mechanical properties of films. The crystal orientation of SiO₂ thin films on K9 is noncrystalline structure and the other two, YAG (100) and YAG (111), are polycrystalline structures. The Young modulus of all films are similar. The nano-scratch tests show that the damage mechanisms of SiO₂ thin films on K9 and YAG are different. The adhesive forces of the films on YAG (100) and YAG (111) are much less than homologous film on K9. The microstructures of the films and the divergences of the elastic modulus between films and substrates are taken to explain the different mechanical behaviors of the films on three substrates.

Key words: SiO₂ film, microstructure, modulus, adhesive force, K9, YAG

中图分类号:

TB43

王河, 贺洪波, 张伟丽. 不同基底上SiO₂薄膜的显微结构和力学性能[J]. 无机材料学报, 2013, 28(06): 653-658.

WANG He, HE Hong-Bo, ZHANG Wei-Li. Substrate Effects on the Microstructure and Mechanical Properties of SiO₂ Thin Films[J]. Journal of Inorganic Materials, 2013, 28(06): 653-658.

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不同基底上SiO₂薄膜的显微结构和力学性能

Substrate Effects on the Microstructure and Mechanical Properties of SiO₂ Thin Films

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