无机材料学报 ›› 2012, Vol. 27 ›› Issue (9): 928-932.DOI: 10.3724/SP.J.1077.2012.11695

• 研究论文 • 上一篇    下一篇

Pt/TiO2表面状态对气敏特性的影响

张茂林1, 袁战恒2, 宋建平2, 郑 程2   

  1. (1. 西安电子科技大学 技术物理学院, 西安710071; 2. 西安交通大学 电信学院, 西安710049)
  • 收稿日期:2011-11-08 修回日期:2012-01-07 出版日期:2012-09-20 网络出版日期:2012-08-28
  • 作者简介:张茂林(1983–), 男, 博士, 讲师. E-mail: mlzhang@xidian.edu.cn
  • 基金资助:

    国家自然科学基金(61078020)

Influence of Surface States on Gas Response Properties of Pt/TiO2

ZHANG Mao-Lin1, YUAN Zhan-Heng2, SONG Jian-Ping2, ZHENG Cheng2   

  1. (1. School of Technical Physics, Xidian University, Xi’an 710071, China; 2. School of Electronic and Information Engineering, Xi’an Jiaotong University, Xi’an 710049, China)
  • Received:2011-11-08 Revised:2012-01-07 Published:2012-09-20 Online:2012-08-28
  • About author:ZHANG Mao-Lin. E-mail: mlzhang@xidian.edu.cn
  • Supported by:

     National Natural Science Foundation of China(61078020)

摘要: 通过浸渍法用H2PtCl6溶液修饰TiO2厚膜, 经过不同的处理工艺, 获得表面负载Pt粒子的Pt/TiO2厚膜. 采用XRD和SEM分析了Pt/TiO2的物相结构和表面形貌, 并通过电阻-氧分压关系计算Pt/TiO2厚膜活化能. 然后分别通过静态和动态测试法, 表征了Pt/TiO2厚膜在H2/O2中的稳态阻值和动态响应时间. 结果表明: 受“spill-over”机制影响, Pt/TiO2厚膜在H2/O2气氛下的稳态电阻与Pt的散布状态有关. 而样品响应时间不仅与Pt粒子的分布有关, 还受表面活化能的影响, 在Pt散布基本相同情况下, 活化能越低, 样品响应速度越快.

关键词: 二氧化钛, 表面状态, 稳态电阻, 响应时间

Abstract: Pt/TiO2 thick film gas sensors were modified by dipping method in H2PtCl6 contained solution. In order to get different Pt/TiO2 surface states, the thick films were treated with different process. Microstructural and morphological characteristics were investigated by XRD and SEM. The resistance-oxygen partial pressure relationship was used to calculate activation energy (E) of this film. Steady-state resistance and dynamic response of the sensor exposed to H2/O2 were tested, separately. The results indicated that the steady-state resistance which affected by “spill-over” effect arose from the Pt distribution states. However, the response time was associated with the activation energy (E). Sensors with lower activation energy exhibited a faster rate of response when the magnitude of response was approximately uniform.

Key words: TiO2, surface state, steady-state resistance, response time

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