金属膜电极层对Na2O-PbO-Nb2O5-SiO2玻璃陶瓷电容器电性能的影响

doi:10.3724/SP.J.1077.2011.00613

无机材料学报 ›› 2011, Vol. 26 ›› Issue (6): 613-618.DOI: 10.3724/SP.J.1077.2011.00613

金属膜电极层对Na₂O-PbO-Nb₂O₅-SiO₂玻璃陶瓷电容器电性能的影响

朱君, 罗君, 张庆猛, 杜军

(北京有色金属研究总院先进电子材料研究所, 北京100088)

收稿日期:2010-08-12 修回日期:2010-09-28 出版日期:2011-06-20 网络出版日期:2011-06-07
作者简介:朱君(1987-), 男, 硕士研究生. E-mail: zjhun@163.com
基金资助:
国家高技术研究发展计划(863计划)(2008AA03A236)

Effect of Metal Film Electrode Layer on Electrical Properties of Na₂O-PbO-Nb₂O₅-SiO₂ Glass-ceramic Capacitors

ZHU Jun, LUO Jun, ZHANG Qing-Meng, DU Jun

(Advanced Electronic Materials Institute, General Research Institute for Nonferrous Metals, Beijing 100088, China)

Received:2010-08-12 Revised:2010-09-28 Published:2011-06-20 Online:2011-06-07
Supported by:
863 Program (2008AA03A236)

摘要/Abstract

摘要： 玻璃陶瓷电容器内电极结构及界面形貌对电性能有重要影响. 采用磁控溅射法在介质层与银浆料电极间分别制备了Pt、Au、Cu和Ag金属膜内电极层, 研究此电极层对Na₂O-PbO-Nb₂O₅-SiO₂玻璃陶瓷电容器电性能的影响. 与单层浆料的电极结构相比, 引入Pt、Au金属膜可以更有效地改善电性能: 等效电容值增加25%, 漏电流降低一个数量级. 由SEM结果可知: Pt、Au、Cu膜与玻璃陶瓷紧密的界面接触能够抑制银向介质中扩散; 然而, 采用单层银浆料或引入Ag金属膜的样品界面多孔且银扩散严重. 以上分析表明: Pt、Au金属膜电极层能够改善玻璃陶瓷电容器界面微观结构, 有效抑制银的扩散, 提高整体电性能.

关键词: 金属膜, 内电极, 玻璃陶瓷电容器, 电性能, 扩散

Abstract: The electrical performance of the stacked glass-ceramic capacitors depends largely on the inner electrode structure and the interface quality. In this work, several metal films, such as Pt, Au, Cu and Ag, were deposited by DC magnetron sputtering serving as inner electrode layers between the dielectric layer and the silver paste electrode of glass-ceramic capacitors. The effect of the deposited metal films on the electrical properties of Na₂O-PbO-Nb₂O₅-SiO₂ glass-ceramic capacitors was investigated. Compared with the single paste electrode structure, Pt and Au metal films could effectively improve the electrical performance of the capacitors, corresponding to an increase of equivalent capacitance by 25% and a decrease of leakage current by an order of magnitude. SEM observations indicate that the Pt, Au and Cu metal films would help the formation of a dense electrode/dielectric interface and inhibit the diffusion of silver, whereas a porous interface and intense silver diffusion are often found in the single screen-printed paste electrode and the deposited Ag metal electrode. The above results reveal that Pt and Au metal films as inner electrodes could make the interface microstructure inhibit the silver diffusion and enhance the overall performance of the glass-ceramic based capacitors.

Key words: metal film, inner electrode, glass ceramic capacitors, electrical properties, diffusion

中图分类号:

TQ174

朱君, 罗君, 张庆猛, 杜军. 金属膜电极层对Na₂O-PbO-Nb₂O₅-SiO₂玻璃陶瓷电容器电性能的影响[J]. 无机材料学报, 2011, 26(6): 613-618.

ZHU Jun, LUO Jun, ZHANG Qing-Meng, DU Jun. Effect of Metal Film Electrode Layer on Electrical Properties of Na₂O-PbO-Nb₂O₅-SiO₂ Glass-ceramic Capacitors[J]. Journal of Inorganic Materials, 2011, 26(6): 613-618.

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金属膜电极层对Na₂O-PbO-Nb₂O₅-SiO₂玻璃陶瓷电容器电性能的影响

Effect of Metal Film Electrode Layer on Electrical Properties of Na₂O-PbO-Nb₂O₅-SiO₂ Glass-ceramic Capacitors

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