反应烧结法制备高强度多孔氮化硅陶瓷

doi:10.3724/SP.J.1077.2011.00422

无机材料学报 ›› 2011, Vol. 26 ›› Issue (4): 422-426.DOI: 10.3724/SP.J.1077.2011.00422

反应烧结法制备高强度多孔氮化硅陶瓷

姚冬旭 ¹,² , 曾宇平 ¹

1. 中国科学院上海硅酸盐研究所 , 高性能陶瓷和超高温结构国家重点实验室上海 200050; 2. 中国科学院研究生院 , 北京 100864

收稿日期:2010-06-26 修回日期:2010-08-24 出版日期:2011-04-20 网络出版日期:2011-04-22
作者简介:姚冬旭 (1983 - ), 男 , 博士研究生 . 通讯联系人曾宇平 , 研究员 .
基金资助:
上海市基础研究重点项目 (08JC1420300); 国家自然科学基金 (50872142, 50902140)

High Flexural Strength Porous Silicon Nitride Prepared via Nitridation of Silicon Powder

YAO Dong-Xu¹,²,ZENG Yu-Ping¹

1. State Key Lab of High Performance Ceramics and Superfine Microstructure Shanghai Institute of Ceramics, Chinese Academy of Sciences, Shanghai 200050, China; 2. Graduate University of Chinese Academy of Sciences, Beijing 100864, China

Received:2010-06-26 Revised:2010-08-24 Published:2011-04-20 Online:2011-04-22
Supported by:
Foundation of Shanghai Science and Technology Committee (08JC1420300); National Natural Science Foundation of China (50872142, 50902140)

摘要/Abstract

摘要： 以硅粉(Si)为起始原料, 氧化钇(Y₂O₃)为烧结助剂, 利用干压成型工艺制备出不同气孔率的多孔硅坯体, 通过反应烧结得到高强度多孔氮化硅(Si₃N₄)陶瓷. 研究了Y₂O₃添加量在不同升温制度下对于氮化率的影响, 以及1500~1750℃后烧结对多孔材料强度的影响. 结果表明: 添加9%Y₂O₃的样品具有较高的氮化率, 主要是Y₂O₃与Si粉表面的SiO₂在较低的温度下反应生成了Y₅Si₃O₁₂N. 在不同的反应条件下可得到气孔率为30%~50%, 强度为160~50MPa的样品. 在1750、 0.5MPaN₂气压下对样品进行后处理, α-Si₃N₄完全转变成柱状β-Si₃N₄, 晶型转变有利于强度提高,气孔率为46%的多孔Si₃N₄其强度可达140MPa.

关键词: 反应烧结, 多孔氮化硅, 强度, 气孔率

Abstract: High flexural strength porous silicon nitride ceramics were prepared via nitridation of silicon powder, using silicon powder and Y₂O₃ as start powder with different forming pressures. The effects of Y₂O₃ contents and heating programs on nitridation rate were studied. The high nitridation rate was obtained when 9% Y₂O₃ was added, which was contributed to Y₂O₃ reacted with SiO₂ at low temperature (1200 ℃ ) to transform to Y₅Si₃O₁₂N and the elimination of SiO₂ on Si surface. Under different sintering conditions, the porous Si₃N₄ ceramics with porosity of 30% - 50% and the flexural strength of 160 - 50MPa were obtained, respectively. After post-sintering at 175 0 ℃ in 0.5MPa N₂ atmosphere, α-Si₃N₄ was fully transformed into β-Si₃N₄by the solution-precipitation process, the rod-like β-Si₃N₄ promoted the flexural strength of the porous Si₃N₄ ceramics, and the porous Si₃N₄ ceramics with a porosity of 46% and a flexural strength of 140MPa was obtained .

Key words: nitridation, porous silicon nitride, flexural strength, porosity

中图分类号:

TB332

姚冬旭, 曾宇平. 反应烧结法制备高强度多孔氮化硅陶瓷[J]. 无机材料学报, 2011, 26(4): 422-426.

YAO Dong-Xu,ZENG Yu-Ping. High Flexural Strength Porous Silicon Nitride Prepared via Nitridation of Silicon Powder[J]. Journal of Inorganic Materials, 2011, 26(4): 422-426.

参考文献

[1] 丁书强. 莫来石结合碳化硅多孔陶瓷的制备与性能研究. 上海: 中国科学院上海硅酸盐研究所博士论文, 2007.
[2] Kawai C, Yamakawa A. Effect of porosity and microstructure on the strength of Si₃N₄: designed microstructure for high strength, high thermal shock resistance, and facile machining. J. Am. Ceram. Soc. , 1997, 80(10 ): 2705 - 2708.
[3] Yang J, Yang J F, Shan S Y, et al. Effect of sintering additives on microstructure and mechanical properties of porous silicon nitride ceramics. J. Am. Ceram. Soc. , 2006, 89(12 ): 3843 - 3845.
[4] Inagaki Y, Ohji T, Kanzaki S, et al. Fracture energy of an aligned porous silicon nitride. J. Am. Ceram. Soc. , 2000, 83(7): 1807 - 1809.
[5] She J H, Yang J F, Jayaseelan D D, et al. Thermal shock behavior of isotropic and anisotropic porous silicon nitride. J. Am. Ceram. Soc. , 2003, 86(4): 738 - 740.
[6] Fukasawa T, Deng Z Y, AndoM, et al. Synthesis of porous silicon nitride with unidirectionally aligned channels using freeze-drying process. J. Am. Ceram. Soc. , 2002, 85(9 ): 2151 - 2155.
[7] Yu Juanli, Wang Hongjie, Zhang Jian, et al. Gelcasting preparation of porous silicon nitride ceramics by adjusting the content of monomers. J. Sol-Gel. Sci. Technol. , 2010, 53(3 ): 515 - 523.
[8] Chen F, Shen Q, Yan F Q, et al. Pressureless sintering of alpha- Si₃N₄ porous ceramics using a H₃PO₄ pore-forming agent. J. Am. Ceram. Soc. , 2007, 90 ( 8): 2379 - 2383.
[9] Xia Y F, Zeng Y P, Jiang D L. Dielectric and mechanical properties of porous Si₃N₄ ceramics prepared via low temperature sintering. Ceram. Int. , 2009, 35(4 ): 1699 - 1703.
[10] Chen F, Shen Q, Yan F Q, et al. Preparation of zirconium pyrophosphate bonded silicon nitride porous ceramics. Mater. Sci. Tech. , 2006, 22(8 ): 915 - 918.
[11] Ding S Q, Zeng Y P, Jiang D L. Oxidation bonding of porous silicon nitride ceramics with high strength and low dielectric constant. Mater. Lett. , 2007, 61(11/12 ): 2277 - 2280.
[12] Yang J F, Shan S Y, Janssen R, et al. Synthesis of fibrous beta-Si₃N₄ structured porous ceramics using carbothermal nitridation of silica. Acta Mater. , 2005, 53(10): 2981 - 2990.
[13] Shan S Y, Yang J F, Lu Y, et al. Effects of carbon source on microstructural evolution and sintering behavior of porous silicon nitride ceramics. Scrip. Mater. , 2007, 56(3): 193 - 196.
[14] Shan S Y, Yang J F, Gao J Q, et al. Porous silicon nitride ceramics prepared by reduction-nitridation of silica. J. Am. Ceram. Soc. , 2005, 88(9): 2594 - 2596.
[15] Luo M, Gao J Q, Yang J F. Biomorphic silicon nitride ceramics with fibrous morphology prepared by Sol infiltration and reduction-nitridation. J. Am. Ceram. Soc. , 2007, 90(12): 4036 - 4039.
[16] Riley F L. Silicon nitride and related materials. J. Am. Ceram. Soc. , 2000, 83(2 ): 245 - 265.
[17] Atkinson A, Evans A D. Temperature gradients in nitrding silicon powder compacts. Trans. Br. Ceram. Soc. , 1974, 73(2 ): 43 - 46.
[18] Mangels J A. Effect of rate-controlled nitriding and nitrding atompspheres on the formation of reaction-bonded Si₃N₄. Am. Ceram. Soc. Bul. , 1981, 60(6 ): 613 - 617.
[19] Müllera M, R?gnerb J, Okolo B, et al. Processing of micro- components made of sintered reaction-bonded silicon nitride (SRBSN). Part 2: Sintering behaviour and micro-mechanical properties. Ceram. Int. , 2010, 36( 2 ): 707 - 717.
[20] Coble R L, Kingery W D. Effect of porosity on physical properties of sintered alumina. J. Am. Ceram. Soc. , 1956, 39(11 ): 377 - 385.
[21] Spriggs R M. Expression for effect of porosity on elastic modulus of polycrystalline refractory materials, particularly aluminum oxide. J. Am. Ceram. Soc. , 1961, 44(12 ): 628 - 629.

反应烧结法制备高强度多孔氮化硅陶瓷

High Flexural Strength Porous Silicon Nitride Prepared via Nitridation of Silicon Powder

PDF (PC)

可视化

被引次数

摘要/Abstract

引用本文

使用本文

参考文献

相关文章 15

编辑推荐

Metrics

本文评价

[1]	靳赛, 刘小根, 齐爽, 赵润昌, 李志军. 激光诱导损伤对熔石英玻璃弯曲强度弱化影响及安全设计[J]. 无机材料学报, 2023, 38(6): 671-677.
[2]	吴爽, 苟燕子, 王永寿, 宋曲之, 张庆雨, 王应德. 高温热处理对国产KD-SA型SiC纤维组成结构与力学性能的影响[J]. 无机材料学报, 2023, 38(5): 569-576.
[3]	华思恒, 杨东旺, 唐昊, 袁雄, 展若雨, 徐卓明, 吕嘉南, 肖娅妮, 鄢永高, 唐新峰. n型Bi₂Te₃基材料表面处理对热电单元性能的影响[J]. 无机材料学报, 2023, 38(2): 163-169.
[4]	李海燕, 郝鸿渐, 田远, 汪长安, 包亦望, 万德田. 残余应力对涂覆Al₂O₃涂层的ZrO₂陶瓷的强度和裂纹扩展阻力的影响[J]. 无机材料学报, 2022, 37(4): 467-472.
[5]	李萌, 黄海露, 吴甲民, 刘春磊, 吴亚茹, 张景贤, 史玉升. 浆料固相含量对数字光处理成形Si₃N₄陶瓷性能的影响[J]. 无机材料学报, 2022, 37(3): 310-316.
[6]	郝鸿渐, 李海燕, 万德田, 包亦望, 李月明. 莫来石/氧化铝预应力涂层增强氧化铝的弯曲强度和抗热震性能[J]. 无机材料学报, 2022, 37(12): 1295-1301.
[7]	王为得, 陈寰贝, 李世帅, 姚冬旭, 左开慧, 曾宇平. 以YbH₂-MgO体系为烧结助剂制备高热导率高强度氮化硅陶瓷[J]. 无机材料学报, 2021, 36(9): 959-966.
[8]	梁汉琴, 尹金伟, 左开慧, 夏咏锋, 姚冬旭, 曾宇平. 添加BaTiO₃的热压烧结Si₃N₄陶瓷的力学和介电性能[J]. 无机材料学报, 2021, 36(5): 535-540.
[9]	包亦望,孙熠,旷峰华,李月明,万德田. 高强度预应力陶瓷的发展与探索[J]. 无机材料学报, 2020, 35(4): 399-406.
[10]	王晴晴,石云,冯亚刚,刘欣,陈昊鸿,谢腾飞,李江. 高光学质量Yb:YAG透明陶瓷的制备及激光参数研究[J]. 无机材料学报, 2020, 35(2): 205-210.
[11]	邵笑,刘睿恒,王亮,初靖,白光辉,柏胜强,顾明,张丽娜,马伟,陈立东. 服役条件下方钴矿基热电元件的界面应力分析[J]. 无机材料学报, 2020, 35(2): 224-230.
[12]	皮慧龙, 张宝鹏, 于新民, 刘伟, 金鑫. 二维C/SiC-ZrC复合材料的低速冲击损伤研究[J]. 无机材料学报, 2020, 35(12): 1327-1332.
[13]	李旭勤, 谭志勇, 成来飞, 周灵柯, 高健. 先驱体浸渍裂解C/SiCN复合材料的拉伸行为与基体开裂机制[J]. 无机材料学报, 2020, 35(11): 1227-1233.
[14]	孟祥玮,吴西士,裴兵兵,朱云洲,黄政仁. 短碳纤维增强碳化硅基复合材料的制备与力学性能[J]. 无机材料学报, 2019, 34(9): 1015-1020.
[15]	程国峰, 阮音捷, 孙玥, 尹晗迪, 解其云. 元素配比对BiFeO₃反应烧结相变影响的高温X射线衍射研究[J]. 无机材料学报, 2019, 34(10): 1035-1040.