衬底对低温化学池沉积法生长的垂直ZnO纳米棒阵列的结构、形态和光学性能的影响

doi:10.3724/SP.J.1077.2010.10153

无机材料学报 ›› 2010, Vol. 25 ›› Issue (10): 1115-1120.DOI: 10.3724/SP.J.1077.2010.10153

• 研究快报 • 上一篇

衬底对低温化学池沉积法生长的垂直ZnO纳米棒阵列的结构、形态和光学性能的影响

孙英岚¹, 边继明^1,2,3, 李庆伟¹, 骆英民¹

(1. 大连理工大学物理与光电工程学院大连116024; 2. 中国科学院上海硅酸盐研究所, 高性能陶瓷和超微结构国家重点实验室, 上海200050; 3. 中国科学院国际材料物理中心, 沈阳110016)

收稿日期:2010-03-18 修回日期:2010-05-14 出版日期:2010-10-20 网络出版日期:2010-09-26

Effects of Substrate on the Structure, Morphology and Optical Properties of Vertically Aligned ZnO Nanorod Arrays Grown by Low-temperature CBD Method

SUN Ying-Lan¹, BIAN Ji-Ming^1,2,3, LI Qing-Wei¹, LUO Ying-Min¹

(1. School of Physics and Optoelectronic Technology, Dalian University of Technology, Dalian 116024, China; 2. State Key Laboratory of High Performance Ceramics and Superfine Microstructure, Shanghai Institute of Ceramics, Chinese Academy of Sciences, Shanghai 200050, China; 3. International Centre for Materials Physics, Chinese Academy of Sciences, Shenyang 110016, China)

Received:2010-03-18 Revised:2010-05-14 Published:2010-10-20 Online:2010-09-26
Supported by:
National Nature Science Foundation of China (10804014); Opening Project of State Key Laboratory of High Performance Ceramics and Superfine Micro Structure (SKL200802SIC)

摘要/Abstract

摘要： 衬底的选择是得到高质量ZnO纳米棒的一个重要因素. 在95℃的较低温度下用CBD方法在不同衬底(石英玻璃, 硅和ITO玻璃)上生长ZnO纳米棒阵列. X射线衍射(XRD)和扫描电镜 (SEM)结果显示六角形的ZnO纳米棒致密垂直地生长在衬底上, 而纳米棒的平均直径和长度则与衬底的性质密切相关. 各种衬底的ZnO纳米棒阵列的室温光致发光(PL)光谱都可以观测到强烈的近带边紫外发射峰, 而无论是晶体还是非晶体, 经常可以观察到的与缺陷相关的深能级发射都几乎观察不到. 这意味着通过这种简便的低温化学方法可以获得高光学性能的ZnO纳米棒阵列. 此外, 不同衬底间UV发射的小幅度迁移可以用压应力来解释, 并用拉曼光谱进行了进一步的证明.

关键词: ZnO, 纳米棒阵列, 化学池沉积法, 光致发光

Abstract: ZnO nanorods were grown on different substrates (quartz glass, Si and ITO glass) by the wet chemical bath deposition (CBD) method at a relatively low temperature of 95℃. X-ray diffraction (XRD) and scanning electron microscope (SEM) results illustrate that the ZnO nanorod arrays with hexagonal wurtzite structure are grown densely and vertically on all the substrates, whereas the average diameter and length are found to be closely related to the substrates nature. High intensity near-band edge ultraviolet (UV) emission peak are observed in room temperature photoluminescence (PL) spectra for the ZnO nanorod arrays on all substrates, yet the usually observed defect related deep level emissions are nearly undetectable regardless of crystalline or amorphous, indicating high optical quality ZnO nanorod arrays can be achieved via this low temperature easy process chemical approach. Moreover, the small shift in the UV emission among different substrates is interpreted in terms of compress stress, which is further demonstrated by the Raman spectra measurement results.

Key words: ZnO, nanorod arrays, chemical bath deposition, photoluminescence

中图分类号:

TB34

孙英岚, 边继明, 李庆伟, 骆英民. 衬底对低温化学池沉积法生长的垂直ZnO纳米棒阵列的结构、形态和光学性能的影响[J]. 无机材料学报, 2010, 25(10): 1115-1120.

SUN Ying-Lan, BIAN Ji-Ming, LI Qing-Wei, LUO Ying-Min. Effects of Substrate on the Structure, Morphology and Optical Properties of Vertically Aligned ZnO Nanorod Arrays Grown by Low-temperature CBD Method[J]. Journal of Inorganic Materials, 2010, 25(10): 1115-1120.

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衬底对低温化学池沉积法生长的垂直ZnO纳米棒阵列的结构、形态和光学性能的影响

Effects of Substrate on the Structure, Morphology and Optical Properties of Vertically Aligned ZnO Nanorod Arrays Grown by Low-temperature CBD Method

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