不同退火过程对FeZrBCu软磁合金薄膜巨磁阻抗效应的影响

doi:10.3724/SP.J.1077.2010.00721

无机材料学报 ›› 2010, Vol. 25 ›› Issue (7): 721-724.DOI: 10.3724/SP.J.1077.2010.00721

不同退火过程对FeZrBCu软磁合金薄膜巨磁阻抗效应的影响

王文静¹, 袁慧敏¹, 萧淑琴²

(1. 山东省教育学院物理系, 济南250013; 2. 山东大学物理学院, 济南250100)

收稿日期:2009-11-11 修回日期:2010-01-26 出版日期:2010-07-20 网络出版日期:2010-06-10
基金资助:
国家自然科学基金(10804062); 山东省教育厅科技计划项目(J08LI62)

Influence of Different Annealing Process on the Giant Mageto-impedance Effect of FeZrBCu Films

WANG Wen-Jing¹, YUAN Hui-Min¹, XIAO Shu-Qin²

(1. Department of Physics, Shandong Institute of Education, Jinan 250013, China; 2. School of Physics, Shandong University, Jinan 250100, China)

Received:2009-11-11 Revised:2010-01-26 Published:2010-07-20 Online:2010-06-10

摘要/Abstract

摘要：

用射频溅射法制备了(Fe₈₈Zr₇B₅)_0.96Cu_0.04非晶软磁合金薄膜. 研究了不同退火条件对其巨磁阻抗(GMI)效应的影响. 该样品在自然退火和电流退火热处理后, 纵向GMI比下降, 并随退火电流的增加而增加, 在电流为800mA时达到最大值17%, 磁场灵敏度相对于未退火样品的4%(kA/m)^-1有所提高, 达到7%(kA/m)^-1. (Fe₈₈Zr₇B₅)_0.96Cu_0.04薄膜经不同温度下纵向磁场退火处理后, 样品的纵向和横向GMI比均有所提高, 在250℃获得最大的GMI比, 13MHz时, 最大纵向磁阻抗比达到17.5%, 表现为单峰; 横向磁阻抗比曲线变为双峰结构, 在±0.4kA/m的磁场下, 出现峰值为17.8%.

关键词: 铁基合金, 薄膜, 巨磁阻抗效应, 感应各向异性

Abstract:

Influence of different annealing process on the giant magneto-impedance (GMI) effect in soft magnetic alloy films of (Fe₈₈Zr₇B₅)_0.96Cu_0.04, which were prepared by radio frequency (RF) sputtering, was studied. It is obtained that both natural and current annealing can reduce the longitudinal GMI ratio. And the longitudinal GMI ratio of the annealed films increases with the increase of annealing current, and reaches a maximum value of 17% at 800mA, while the sensitivity increase to 7%(kA/m)^-1 at such annealing current (800mA). In addition, influence of the magnetic field annealing on GMI effect is discussed. It is found that both the longitudinal and transverse GMI ratios of the films after magnetic field annealed increase at different temperatures. There exists a critical temperature (250℃), at which the longitudinal GMI ration presents a single-peak with a value of 17.5%, while the transverse one presents a double-peak with a value of 17.8% at ±0.4kA/m.

Key words: Fe-based alloy, films, giant magneto-impedance effect, induced anisotropy

中图分类号:

O484

王文静, 袁慧敏, 萧淑琴. 不同退火过程对FeZrBCu软磁合金薄膜巨磁阻抗效应的影响[J]. 无机材料学报, 2010, 25(7): 721-724.

WANG Wen-Jing, YUAN Hui-Min, XIAO Shu-Qin. Influence of Different Annealing Process on the Giant Mageto-impedance Effect of FeZrBCu Films[J]. Journal of Inorganic Materials, 2010, 25(7): 721-724.

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不同退火过程对FeZrBCu软磁合金薄膜巨磁阻抗效应的影响

Influence of Different Annealing Process on the Giant Mageto-impedance Effect of FeZrBCu Films

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