BST/BZT/BST多层薄膜结构与性能研究

doi:10.3724/SP.J.1077.2010.00247

摘要/Abstract

摘要： 利用脉冲激光沉积法在LaNiO₃ /LaAlO₃ (001)基片上生长了Ba _0.6 Sr_0.4 TiO₃（BST）和Ba(Zr _0.2 Ti _0.8 )O₃（BZT）单层薄膜,以及Ba(Zr _0.2 Ti _0.8 )O₃/ Ba _0.6 Sr_0.4 TiO₃/ Ba(Zr _0.2Ti _0.8 )O₃（BZT/BST/BZT）多层薄膜.X射线衍射（XRD）分析发现,BST、BZT和LNO薄膜都具有高度的（00l）取向.原子力显微镜（AFM）显示三种样品表面光滑无裂纹,晶粒尺寸和表面粗糙度相当.电容测试表明,相对BST、BZT单层薄膜,多层薄膜具有最大的品质因数42.07.表明多层薄膜在微波应用中具有很大的潜力.

关键词: BST/BZT/BST, 薄膜, 介电常数, 漏电流

Abstract: Ba _0.6 Sr_0.4 TiO₃（BST） thin film, Ba(Zr _0.2 Ti _0.8 )O₃（BZT）thin film and Ba _0.6 Sr_0.4 TiO₃（BST）/Ba(Zr _0.2 Ti _0.8 )O₃（BZT）/Ba _0.6 Sr_0.4 TiO₃（BST） (BST/BZT/BST) multilayer thin film were prepared by pulsed laser deposition (PLD) on the LaNiO₃ (LNO) coated LaAlO₃ (LAO) substrate. All the three kinds of films were characterized by XRD and atomic force microscope (AFM). XRD tests reveal that highquality ［00l］oriented films are obtained.AFM results show that the grain size and root mean square (RMS) roughness of BST/BZT/BST sandwich film are similar to that of BST film and BZT film. Compared with BST and BZT film, the BST/BZT/BST film posses the highest figure of merit FOM (42.07), indicating the highly promising potential of BST/BZT/BST film for the application in tunable microwave device.

Key words: ^{BST/BZT/BST film,} thin films, dielectric constant, leakage current characteristics

中图分类号:

TN305

秦文峰,熊杰,李言荣. BST/BZT/BST多层薄膜结构与性能研究[J]. 无机材料学报, DOI: 10.3724/SP.J.1077.2010.00247.

QIN Wen-Feng,XIONG Jie,LI Yan-Rong. Structure and Properties of BST/BZT/BST Multilayer Film[J]. Journal of Inorganic Materials, DOI: 10.3724/SP.J.1077.2010.00247.

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