MOD制备的PZT薄膜的相结构发展和成分分析

无机材料学报

MOD制备的PZT薄膜的相结构发展和成分分析

包定华; 吴小清; 张良莹; 姚熹

西安交通大学电子材料与器件研究所; 西安 710049

收稿日期:1998-03-26 修回日期:1998-05-15 出版日期:1999-02-20 网络出版日期:1999-02-20

Phase Structure Development and Composition Analysis of PZT Thin Films Prepared by Metallo-organic Decomposition

BAO Ding-Hua; WU Xiao-Qing; ZHANG Liang-Ying; YAO Xi

Electronic Materials Research Laboratory; Xi an Jiaotong University Xi an 710049 China

Received:1998-03-26 Revised:1998-05-15 Published:1999-02-20 Online:1999-02-20

摘要/Abstract

摘要： 采用MOD工艺制备了PZT薄膜，利用XRD和TEM研究了焦绿石相向钙钛矿相的转变过程．制备在Pt／Ti／SiO₂／Si衬底上的PZT薄膜，其XRD分析显示焦绿石相在600℃完全转变为钙钛矿相；与之相比，Pt箔上无支持的PZT薄膜，其TBM分析表明PZT焦绿石相完全转变为钙钛矿相的温度更高，且与薄膜的厚度有关．XPS研究表明，薄膜表面含有化学吸附氧和污染碳，无其它杂质存在.表面富含少量Pb，其Zr／Ti比与化学计量比一致，但晶格中缺氧．

关键词: 锆钛酸铅薄膜, 结构相变, 成分分析

Abstract: PZT thin films were prepared by metallo-organic decomposition(MOD). Phase transformation from pyrochlore to perovskite was studied by XRD and TEM.
XRD analysis showed that pyrochlore phase transformes into perovskite phase fully above 600℃for the PZT thin films on Pt/Ti/SiO₂/Si
substrates. However, TEM results indicated, for the free-standing PZT thin films on Pt foil with many microholes, that the transforming
temperature from pyrochlore to perovskite is much higher, and the temperature is related to the thickness of thin films. The surface
states of MOD derived PZT thin films were investigated by X-ray photoelectron spectroscopy(XPS) with whole and narrow scanning
measurement. The results showed that there are chemical-absorbed oxygen and contamination of carbon in the film surfaces which came
from sample handling or pumping oil. Other impurity could not be detected. The films have a little Pb-rich in the surface and a
stoichiometry of Zr/Ti ratio. However, the crystal lattice of the thin film is oxygen-deficiency.

Key words: PZT thin film, phase transition, composition analysis

中图分类号:

O484

包定华,吴小清,张良莹,姚熹. MOD制备的PZT薄膜的相结构发展和成分分析[J]. 无机材料学报.

BAO Ding-Hua,WU Xiao-Qing,ZHANG Liang-Ying,YAO Xi. Phase Structure Development and Composition Analysis of PZT Thin Films Prepared by Metallo-organic Decomposition[J]. Journal of Inorganic Materials.

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