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无机材料学报

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连续式离子层吸附与反应法沉积CuSCN薄膜及其微观结构、光学特性研究

诸葛福伟1,2， 高相东1， 李效民1， 甘小燕1,2   

  1. 1. 中国科学院 上海硅酸盐研究所 高性能陶瓷和超微结构国家重点实验室，上海 200050; 2. 中国科学院 研究生院，北京 100049
  • 收稿日期:2008-03-23 修回日期:2008-06-02 出版日期:2009-01-20 网络出版日期:2009-01-20

Microstructure and Optical Properties of CuSCN Thin Film Deposited by
Successive Ionic Layer Adsorption and Reaction (SILAR) Method

ZHUGE Fu-Wei1,2, GAO Xiang-Dong1, LI Xiao-Min1, GAN Xiao-Yan1,2   

  1. 1．Shanghai Institute of Ceramics, Chinese Academy of Sciences, Shanghai 200050, China; 2. Graduate University of the Chinese Academy of Sciences, Beijing 100049, China

  • Received:2008-03-23 Revised:2008-06-02 Published:2009-01-20 Online:2009-01-20

PDF (PC)

2036

被引次数

7 | 2

摘要： 采用乙二醇作溶剂，以连续式离子层吸附与反应法（SILAR）实现硫氰酸亚铜（CuSCN）薄膜在ITO、TiO2薄膜以及玻璃衬底上的沉积.通过X射线衍射、扫描电镜和紫外-可见光透过谱等手段表征薄膜结晶性、表面和断面微观形貌以及光学特性.结果表明，衬底以及溶剂性质均对SILAR法薄膜沉积过程存在重要影响.ITO衬底上获得的CuSCN薄膜更为致密，呈结晶态，而TiO2薄膜衬底上的CuSCN薄膜主要由颗粒组成，为非晶态.随沉积次数增加，薄膜表面粗糙度增大，光学透过率逐渐下降.在优化条件下（ITO衬底，20次沉积循环），所得CuSCN薄膜表面致密均匀，可见光透过率约60%.

关键词: CuSCN, 连续式离子层吸附与反应, 微观结构, 光学性能

Abstract: Cuprous thiocyanate (CuSCN) thin films were deposited on ITO, spin-coated TiO2 and glass substrates by successive ion layer adsorption and reaction (SILAR) method in ethylene glycol (EG) solution. Crystallinity, surface morphology and optical properties of the CuSCN thin films were characterized by XRD, scanning electron microscope and transmission spectra respectively. Results show that deposition of CuSCN is greatly affected by properties of substrates and solutions. CuSCN thin film deposited on ITO is dense and crystalline, while CuSCN thin film deposited on spin-coated TiO2 is particulate and amorphous. Roughness of CuSCN thin film increases with increasing cycles, resulting in decrease of transmittance of CuSCN thin film. At optimal conditions (ITO substrate, 20 cycles), the CuSCN thin film is dense and uniform in surface morphology, transmittance of which in the visible range is about 60%.

Key words: CuSCN, SILAR, micro structure, optical properties

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