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无机材料学报

无机材料学报

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Ba0.7Sr0.3TiO3薄膜的制备、结构及性能研究

叶扬; 丁爱丽; 唐新桂; 罗维根   

  1. 中国科学院上海硅酸盐研究所无机功能材料开放实验室 上海 200050
  • 收稿日期:2001-01-12 修回日期:2001-01-18 出版日期:2002-01-20 网络出版日期:2002-01-20

Preparation, Structure and Properties of Ba0.7Sr0.3TiO3 Thin Films

YE Yang; DING Ai-Li; TANG Xin-Gui; LUO Wei-Gen   

  1. Laboratory of Functional Inorganic Materials; Shanghai Institute of Ceramics; Chinese Academy of Sciences; Shanghai 200050; China
  • Received:2001-01-12 Revised:2001-01-18 Published:2002-01-20 Online:2002-01-20

摘要： 研究了一种以乙二醇为稳定剂的新的ＢＳＴ前驱液，用ｓｏｌ－ｇｅｌ法在Ｐｔ／Ｔｉ／ＳｉＯ２／Ｓｉ（１００）基底上成功地制备出具有优良电学性能的Ｂａ０．７Ｓｒ０．３　ＴｉＯ３薄膜．乙二醇的加入有效地增加了前驱液的稳定性，并降低薄膜的结晶温度．利用ＸＲＤ、ＤＴＡ等技术分析了凝胶热处理过程中相变化情况及薄膜厚度与成相的关系．厚度 ２００ｎｍ，Ｏ２气氛中 ７００℃处理 １５ｍｉｎ后的 ＢＳＴ薄膜具有良好的介电性能，１００ｋＨｚ时介电常数ε＞４００，介电损耗 Ｄ＜０．０２；Ｐ—Ｅ电滞回线说明薄膜具有良好的铁电性能，剩余极化只约为１．４μＣ／ｃｍ２，矫顽场强 Ｅｃ约为 ４８ｋＶ／ｃｍ．

关键词: BST薄膜, 溶胶-凝胶法, 乙二醇, P—E电滞回线

Abstract: Barium strontium titanate，Ba0.7Sr0.3TiO3 thin films with good electrical properties were prepared on Pt/Ti/SiO_2/Si (100) substrates by a
modified sol-gel processing with a new precursor solution，ethylene glycol was introduced as a necessary component of the solution to increase the stability of
precipitation and to decrease the crystallization temperature of films. The thermolysis process of the BST-gel was analyzed by DTA and XRD, and the effects
of thickness on phase formation were investigated. A dielectric constant >400 and a dissipation factor <0.02 were measured at 100kHz for BST films heated to 700℃ for 15min in O2 with a thickness of 200nm. P-E hysteresis loop
studies indicated a remanent polarization (Pr) of 1.4μC/cm2 and a coercive field (Ec)of 48kV/cm .

Key words: BST thin films, sol-gel method, ethylene glycol, P-E hysteresis loop

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